Patents by Inventor Barbara Stanczyk

Barbara Stanczyk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM
    Publication number: 20160056061
    Abstract: Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.
    Type: Application
    Filed: November 5, 2015
    Publication date: February 25, 2016
    Inventors: Jiansheng Wang, Barbara Stanczyk, Wendell Boyd, JR., Kevin A. Papke, Joseph F. Sommers, David Do
  • REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM
    Publication number: 20120216833
    Abstract: Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.
    Type: Application
    Filed: February 24, 2011
    Publication date: August 30, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Jiansheng Wang, Barbara Stanczyk, Wendell Boyd, JR., Kevin A. Papke, Joseph F. Sommers, David Do