Patents by Inventor Barrie James Hughes

Barrie James Hughes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and machine for pattern writing by an electron beam
    Patent number: 6781140
    Abstract: A method of writing a pattern on the surface of a substrate by an electron beam is provided comprising exposing the substrate surface to an electron beam controlled to progressively describe the pattern by stepped movement of a focussed spot of the beam over the surface, and varying the exposure of the surface to the beam by selectably modulating the beam in the periods between successive movement steps to reduce the level of electron dose in predetermined positions of the beam spot on the surface.
    Type: Grant
    Filed: September 11, 2000
    Date of Patent: August 24, 2004
    Assignee: Leica Microsystems Lithography Limited
    Inventors: David Martin Platton King, Barrie James Hughes