Patents by Inventor Barry Allen McPherron

Barry Allen McPherron has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of wet etching aluminum oxide to minimize undercutting
    Patent number: 5876614
    Abstract: The method of wet etching an aluminum oxide substrate deposits a thin layer of titanium film or chromium film on the aluminum oxide surface prior to the application of the photo-resist coating to form a barrier between the aluminum oxide and the photo-resist. This barrier layer inhibits the reaction between the aluminum oxide and the photo-resist during the photolithographic process. The undercutting of the aluminum oxide in the wet etching process is therefore controlled by the deposition of the barrier layer comprising the thin layer of titanium film or chromium film. The titanium film used is nominally 30 .ANG. thick to obtain the beneficial effects noted above while the chromium film would be approximately 1000 .ANG. thick.
    Type: Grant
    Filed: April 18, 1997
    Date of Patent: March 2, 1999
    Assignee: Storage Technology Corporation
    Inventors: Bo Zhou, Barry Allen McPherron, Subrata Dey, Yi-Shung Chaug