Patents by Inventor Barry Clark
Barry Clark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12235045Abstract: The disclosure describes equipment for magnetic annealing of a substrate, the equipment including: an anneal chamber configured to heat and cool a substrate held at a soak location along a first direction in the anneal chamber, the anneal chamber including: a heater, a cooler, and a substrate lifter including a substrate holder, where the substrate holder is configured to support a substrate oriented such that the first direction is perpendicular to a major surface of the substrate; and a magnet assembly configured to establish a homogeneous zone in the anneal chamber, the soak location being within the homogeneous zone, the homogeneous zone including a region of magnetic field.Type: GrantFiled: March 25, 2022Date of Patent: February 25, 2025Assignee: TOKYO ELECTRON LIMITEDInventors: Ian Colgan, Ioan Domsa, George Eyres, Bartlomiej Burkowicz, Barry Clarke, David Hurley, Einstein Noel Abarra
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Patent number: 11894240Abstract: A system for processing semiconductor wafers, the system including: a processing chamber; a heat source; a substrate holder configured to expose a semiconductor wafer to the heat source; a first electrode configured to be detachably coupled to a first major surface of a semiconductor wafer; and a second electrode coupled to the substrate holder, the first electrode and the second electrode together configured to apply an electric field in the semiconductor wafer.Type: GrantFiled: February 25, 2021Date of Patent: February 6, 2024Assignee: TOKYO ELECTRON LIMITEDInventors: David Hurley, Ioan Domsa, Ian Colgan, Gerhardus Van Der Linde, Patrick Hughes, Maciej Burel, Barry Clarke, Mihaela Ioana Popovici, Lars-Ake Ragnarsson, Gerrit J. Leusink, Robert Clark, Dina Triyoso
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Patent number: 11837652Abstract: A method of fabricating a semiconductor device includes placing a semiconductor wafer into a processing chamber, the semiconductor wafer including a first conductive layer and a second conductive layer separated by an intermediate layer; applying an electrical bias voltage across the intermediate layer by coupling the first conductive layer to a first potential and coupling the second conductive layer to a second potential; and annealing the semiconductor wafer while applying the electrical bias voltage.Type: GrantFiled: May 9, 2022Date of Patent: December 5, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: David Hurley, Ioan Domsa, Ian Colgan, Gerhardus Van Der Linde, Patrick Hughes, Maciej Burel, Barry Clarke, Mihaela Ioana Popovici, Lars-Ake Ragnarsson
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Publication number: 20230304741Abstract: The disclosure describes equipment for magnetic annealing of a substrate, the equipment including: an anneal chamber configured to heat and cool a substrate held at a soak location along a first direction in the anneal chamber, the anneal chamber including: a heater, a cooler, and a substrate lifter including a substrate holder, where the substrate holder is configured to support a substrate oriented such that the first direction is perpendicular to a major surface of the substrate; and a magnet assembly configured to establish a homogeneous zone in the anneal chamber, the soak location being within the homogeneous zone, the homogeneous zone including a region of magnetic field.Type: ApplicationFiled: March 25, 2022Publication date: September 28, 2023Inventors: Ian Colgan, Ioan Domsa, George Eyres, Bartlomiej Burkowicz, Barry Clarke, David Hurley, Einstein Noel Abarra
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Patent number: 11527345Abstract: An apparatus for magnetic annealing one or more workpieces, and a method of operating the apparatus, are described. The apparatus includes: a workpiece holder configured to support one or more workpieces, wherein the one or more workpieces having at least one substantially planar surface; an optional workpiece heating system configured to elevate the one or more workpieces to an anneal temperature; and a magnet assembly having a first magnet and a second magnet, the first and second magnets defining a gap between opposing poles of each magnet, wherein the magnet assembly is arranged to generate a magnetic field substantially perpendicular to the planar surface of the one or more workpieces.Type: GrantFiled: January 3, 2018Date of Patent: December 13, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Ian Colgan, Ioan Domsa, George Eyres, Toru Ishii, Makoto Saito, David Hurley, Noel O'Shaughnessy, Barry Clarke, Gerhardus Van Der Linde, Pat Hughes
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Publication number: 20220262921Abstract: A method of fabricating a semiconductor device includes placing a semiconductor wafer into a processing chamber, the semiconductor wafer including a first conductive layer and a second conductive layer separated by an intermediate layer; applying an electrical bias voltage across the intermediate layer by coupling the first conductive layer to a first potential and coupling the second conductive layer to a second potential; and annealing the semiconductor wafer while applying the electrical bias voltage.Type: ApplicationFiled: May 9, 2022Publication date: August 18, 2022Inventors: David Hurley, Ioan Domsa, lan Colgan, Gerhardus Van Der Linde, Patrick Hughes, Maciej Burel, Barry Clarke, Mihaela Ioana Popovici, Lars-Ake Ragnarsson
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Patent number: 11335792Abstract: A method of fabricating a semiconductor device includes placing a semiconductor wafer into a processing chamber, the semiconductor wafer including a first conductive layer and a second conductive layer separated by an intermediate layer; applying an electrical bias voltage across the intermediate layer by coupling the first conductive layer to a first potential and coupling the second conductive layer to a second potential; and annealing the semiconductor wafer while applying the electrical bias voltage.Type: GrantFiled: April 6, 2020Date of Patent: May 17, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: David Hurley, Ioan Domsa, Ian Colgan, Gerhardus Van Der Linde, Patrick Hughes, Maciej Burel, Barry Clarke, Mihaela Ioana Popovici, Lars-Ake Ragnarsson
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Publication number: 20210313189Abstract: A system for processing semiconductor wafers, the system including: a processing chamber; a heat source; a substrate holder configured to expose a semiconductor wafer to the heat source; a first electrode configured to be detachably coupled to a first major surface of a semiconductor wafer; and a second electrode coupled to the substrate holder, the first electrode and the second electrode together configured to apply an electric field in the semiconductor wafer.Type: ApplicationFiled: February 25, 2021Publication date: October 7, 2021Inventors: David Hurley, Ioan Domsa, Ian Colgan, Gerhardus Van Der Linde, Patrick Hughes, Maciej Burel, Barry Clarke, Mihaela Ioana Popovici, Lars-Ake Ragnarsson, Gerrit J. Leusink, Robert Clark, Dina Triyoso
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Publication number: 20210313444Abstract: A method of fabricating a semiconductor device includes placing a semiconductor wafer into a processing chamber, the semiconductor wafer including a first conductive layer and a second conductive layer separated by an intermediate layer; applying an electrical bias voltage across the intermediate layer by coupling the first conductive layer to a first potential and coupling the second conductive layer to a second potential; and annealing the semiconductor wafer while applying the electrical bias voltage.Type: ApplicationFiled: April 6, 2020Publication date: October 7, 2021Inventors: David Hurley, Ioan Domsa, Ian Colgan, Gerhardus Van Der Linde, Patrick Hughes, Maciej Burel, Barry Clarke, Mihaela Ioana Popovici, Lars-Ake Ragnarsson
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Patent number: 10254046Abstract: Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.Type: GrantFiled: August 31, 2015Date of Patent: April 9, 2019Assignee: Tokyo Electron LimitedInventors: Mitsuru Yamazaki, Barry Clarke, Ian Colgan, George Eyres, Ioan Domsa
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Patent number: 9851149Abstract: Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.Type: GrantFiled: August 26, 2015Date of Patent: December 26, 2017Assignee: Tokyo Electron LimitedInventors: Mitsuru Yamazaki, Barry Clarke, Jattie Van Der Linde, Makoto Saito, Kazuyoshi Sugawara, Toshiji Abe, Tadashi Enomoto
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Publication number: 20160061526Abstract: Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.Type: ApplicationFiled: August 31, 2015Publication date: March 3, 2016Inventors: Mitsuru Yamazaki, Barry Clarke, Ian Colgan, George Eyres, Ioan Domsa
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Publication number: 20160061525Abstract: Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.Type: ApplicationFiled: August 26, 2015Publication date: March 3, 2016Inventors: Mitsuru Yamazaki, Barry Clarke, Jattie Van Der Linde, Makoto Saito, Kazuyoshi Sugawara, Toshiji Abe, Tadashi Enomoto
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Patent number: 9098963Abstract: A method of operating a sensor 112 having a first transmit plate 114, a second receive plate 115 and a dielectric material between the two plates 114, 115. The method comprises the steps of: applying an alternating across the transmit and receive plates 114, 115, thereby to create an alternating electric field, which applied voltage results in a current Iz flowing through the two plates 114, 115; producing a voltage signal corresponding to the resultant current Iz; determining the average value of the product of the corresponding voltage signal and a reference voltage signal Vref3; and adjusting the phase of the reference voltage Vref3 until a null condition is achieved, at which condition the average value is approximately zero. A sensor 112 is also disclosed.Type: GrantFiled: December 19, 2011Date of Patent: August 4, 2015Assignee: NCR CorporationInventors: Barrie Clark, Jim Henderson
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Patent number: 8922498Abstract: A touch screen unit comprises a touch sensitive layer, a display and a processor. The processor is arranged to receive a signal indicative of a parallax error between a user's view of the touch sensitive layer and the user selectable objects displayed on the display and to correct for this parallax error.Type: GrantFiled: August 6, 2010Date of Patent: December 30, 2014Assignee: NCR CorporationInventors: Jan Vesely, Andrew Colley, Barrie Clark
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Publication number: 20130154612Abstract: A method of operating a sensor 112 having a first transmit plate 114, a second receive plate 115 and a dielectric material between the two plates 114, 115. The method comprises the steps of: applying an alternating across the transmit and receive plates 114, 115, thereby to create an alternating electric field, which applied voltage results in a current Iz flowing through the two plates 114, 115; producing a voltage signal corresponding to the resultant current Iz; determining the average value of the product of the corresponding voltage signal and a reference voltage signal Vref3; and adjusting the phase of the reference voltage Vref3 until a null condition is achieved, at which condition the average value is approximately zero. A sensor 112 is also disclosed.Type: ApplicationFiled: December 19, 2011Publication date: June 20, 2013Applicant: NCR CorporationInventors: Barrie Clark, Jim Henderson
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Publication number: 20130054472Abstract: A system and method of wirelessly downloading digital media items which automatically downloads the digital media items to portable communication devices in environments where users are engaged with other activities. An example system includes a network including a wireless network defining a zone of coverage, and a server. The server stores locked digital media items, establishes an account for a digital media customer, automatically downloads selected locked digital media items to a portable communication device of the customer when the customer has brought the portable communication device within the zone of coverage and the portable communication device is connected to the server through the wireless network, processes payment from the customer for a number of downloaded locked digital media items, and provides keys for unlocking the number of downloaded locked digital media items.Type: ApplicationFiled: August 31, 2011Publication date: February 28, 2013Applicant: NCR CORPORATIONInventor: Barrie Clark
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Patent number: 8314823Abstract: A printer comprises a moveable print head such that print elements of the print head are able to print to two streams of media having different physical locations.Type: GrantFiled: December 24, 2009Date of Patent: November 20, 2012Assignee: NCR CorporationInventors: Ranjithkumar Mukeri Gunabalan, Phani Kumar Vutukuri, Raghul Sambathkumar, Barrie Clark
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Patent number: 8251282Abstract: A card reader device has a card entrance for receiving a card and a card enclosure in registration with the card entrance. The card enclosure defines an area in which the card is read. The card reader also has a card transport mechanism for drawing a card into the card enclosure and for ejecting the card from the card enclosure. A sensor is provided for sensing displacement of part of the card transport mechanism in a direction transverse to the plane of transport of the card, and a control circuit ascertains if the displacement of the card transport mechanism fulfills an alarm criterion.Type: GrantFiled: December 20, 2007Date of Patent: August 28, 2012Assignee: NCR CorporationInventors: Barrie Clark, Scott L. Colston
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Patent number: 8116995Abstract: Methods and apparatus for media characterization in a self-service terminal are described. The media us characterized in the self-service terminal by passing it by two electrodes and measuring the impedance across those two electrodes. The media is characterized by analyzing the measured impedance. The impedance may be measured by applying a modulated reference signal to one electrode and detecting the current on the second electrode. In an embodiment, the detected current may be converted into a voltage signal and mixed with a phase shifted version of the modulated reference signal.Type: GrantFiled: December 20, 2007Date of Patent: February 14, 2012Assignee: NCR CorporationInventors: Scott L. Colston, Barrie Clark