Patents by Inventor Barry Coonan

Barry Coonan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma chamber conditioning
    Patent number: 6656848
    Abstract: A method for determining the optimum number of conditioning wafers to be run following a wet clean of the walls of an RF plasma chamber 1 is based on an electrical precursor signal. Polymer build up on a plasma chamber wall during normal chamber conditioning is monitored by observing components of the fundamental RF signal. After a pre-determined number of wafers has been run, a predictive model is used to determine the total number of wafers needed to complete the conditioning cycle.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: December 2, 2003
    Assignee: Scientific Systems Research Limited
    Inventors: John Scanlan, Kevin O'Leary, Barry Coonan