Patents by Inventor Barry Dick

Barry Dick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Salsa clean process
    Patent number: 6340395
    Abstract: A wet spray cleaning process for removing thick organic layers including hardened photoresist from the surface of silicon wafers yields low residual particle counts for photoresist thicknesses up to 3 microns, and maintains low residual particle density for oxide-covered wafer regions. The cleaning process uses multiple cycles of SPM/DI/APM/DI, without an intervening drying step therebetween.
    Type: Grant
    Filed: March 16, 2000
    Date of Patent: January 22, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Jacques Bertrand, Barry Dick, Shu Tsai Wang, Weiwen Ou, Lynne A. Okada, Yen C. Chu