Abstract: An improved partial reflector is disclosed in which the reflector is configured to provide selected levels of reflectance, transmittance and efficiency that are substantially uniform over the visible wavelength range of 400 to 700 nanometers. This result is achieved using a special three-layer coating that includes a metal layer sandwiched between two metal oxide dielectric layers having relatively high refractive indices >2.0. Advantageously, the three layers all incorporate the same metal, preferably niobium.

Abstract: A thin film strain gage is deposited on a flexure beam under controlled deposition conditions such that the dielectric parts thereof are normally in a compressive state. During use, when the strain gage is flexed in a manner tending to place parts thereof in tension, the dielectric parts are instead maintained either in compression, which is their more resistant state against mechanical fracture, or only in slight tension. Specifically, the dielectric films are deposited by sputtering with the substrate negatively biased, with the deposition rate and substrate temperature maintained at predetermined levels for enhancing compressive deposition.

Abstract: A thin film strain gage is deposited on a flexure beam under controlled deposition conditions such that the dielectric parts thereof are normally in a compressive state. During use, when the strain gage is flexed in a manner tending to place parts thereof in tension, the dielectric parts are instead maintained either in compression, which is their more resistant state against mechanical fracture, or only in slight tension. Specifically, the dielectric films are deposited by sputtering with the substrate negatively biased, with the deposition rate and substrate temperature maintained at predetermined levels for enhancing compressive deposition.