Patents by Inventor Barry Gelernt
Barry Gelernt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9081193Abstract: Optical systems and methods including interferometric systems and methods are disclosed herein. In some embodiments, the present invention relates to a system comprising at least one light source including a deep ultraviolet light source, a lens device, a beam splitter, and a camera device. The lens device receives first light, directs at least some of that light toward a target location, receives reflected light therefrom, and directs at least some of the reflected light toward a further location, where at least part of a light path between the deep ultraviolet light source and the target location is other than at a high vacuum. The camera device is positioned at either the further location or an additional location, whereby an image is generated by the camera device based upon at least a portion of the reflected light. Also encompassed herein are interferometric lithography and optical microscopy systems.Type: GrantFiled: June 21, 2013Date of Patent: July 14, 2015Assignees: The Arizona Board of Regents on Behalf of the University of Arizona, Invent Technologies LLCInventors: Barry Gelernt, Thomas D. Milster, Thiago Jota
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Publication number: 20130278922Abstract: Optical systems and methods including interferometric systems and methods are disclosed herein. In some embodiments, the present invention relates to a system comprising at least one light source including a deep ultraviolet light source, a lens device, a beam splitter, and a camera device. The lens device receives first light, directs at least some of that light toward a target location, receives reflected light therefrom, and directs at least some of the reflected light toward a further location, where at least part of a light path between the deep ultraviolet light source and the target location is other than at a high vacuum. The camera device is positioned at either the further location or an additional location, whereby an image is generated by the camera device based upon at least a portion of the reflected light. Also encompassed herein are interferometric lithography and optical microscopy systems.Type: ApplicationFiled: June 21, 2013Publication date: October 24, 2013Applicant: INVENT TECHNOLOGIES, LLCInventors: Barry Gelernt, Thomas D. Milster, Thiago Jota
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Patent number: 8472111Abstract: An apparatus and method for performing optical microscopy are disclosed. In at least one embodiment, the apparatus includes a deep ultraviolet light source configured to generate light having a wavelength within a window in the deep ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. Further, the apparatus includes a lens device that receives at least a first portion of the generated light, directs at least some of the first portion of the generated light toward a location, receives reflected light from the location, and directs at least some of the reflected light toward a further location. Additionally, the apparatus includes a camera device that is positioned at one of the further location and an additional location, where the camera device receives at least a second portion of the reflected light, whereby an image is generated by the camera device.Type: GrantFiled: June 12, 2007Date of Patent: June 25, 2013Assignees: The Arizona Board of Regents on behalf of the University of Arizona, Invent Technologies LLCInventors: Barry Gelernt, Thomas D. Milster
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Patent number: 7916291Abstract: Apparatuses and methods for performing spectroscopy and optical microscopy are disclosed. In at least one embodiment, a Raman spectrometer includes a vacuum ultraviolet light source configured to generate light having a wavelength within a window in the vacuum ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. The spectrometer also includes a lens device that receives a first portion of the generated light, directs at least some of the first portion of the generated light toward a target location, receives reflected light from the target location, and directs the reflected light toward a further location. The spectrometer further includes a dispersive device that receives at least some of the reflected light and outputs dispersed light produced based thereupon, and a camera module that is positioned at additional location, where the camera module receives at least some of the dispersed light.Type: GrantFiled: November 6, 2009Date of Patent: March 29, 2011Assignees: The Arizona Board of Regents on Behalf of The University of Arizona, Invent Technologies LLCInventors: Thomas D. Milster, Pramod Kumar Khulbe, Barry Gelernt
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Publication number: 20100053599Abstract: Apparatuses and methods for performing spectroscopy and optical microscopy are disclosed. In at least one embodiment, a Raman spectrometer includes a vacuum ultraviolet light source configured to generate light having a wavelength within a window in the vacuum ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. The spectrometer also includes a lens device that receives a first portion of the generated light, directs at least some of the first portion of the generated light toward a target location, receives reflected light from the target location, and directs the reflected light toward a further location. The spectrometer further includes a dispersive device that receives at least some of the reflected light and outputs dispersed light produced based thereupon, and a camera module that is positioned at additional location, where the camera module receives at least some of the dispersed light.Type: ApplicationFiled: November 6, 2009Publication date: March 4, 2010Inventors: Thomas D. Milster, Pramod Kumar Khulbe, Barry Gelernt
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Publication number: 20090168152Abstract: An apparatus and method for performing optical microscopy are disclosed. In at least one embodiment, the apparatus includes a deep ultraviolet light source configured to generate light having a wavelength within a window in the deep ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. Further, the apparatus includes a lens device that receives at least a first portion of the generated light, directs at least some of the first portion of the generated light toward a location, receives reflected light from the location, and directs at least some of the reflected light toward a further location. Additionally, the apparatus includes a camera device that is positioned at one of the further location and an additional location, where the camera device receives at least a second portion of the reflected light, whereby an image is generated by the camera device.Type: ApplicationFiled: June 12, 2007Publication date: July 2, 2009Inventors: Barry Gelernt, Thomas D. Milster
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Publication number: 20070183291Abstract: An optical storage device and method of operating that device are disclosed. The device includes an optical storage medium, and a light source capable of generating light that is transmitted to the medium. The light generated by the light source is at a first wavelength that is within the vacuum ultraviolet region of the electromagnetic spectrum and satisfies at least one of the following criteria: (i) the wavelength is within a 1.0 nm-wide window in the vacuum ultraviolet region of the electromagnetic spectrum at which a local minimum in the absorption coefficient of Oxygen (O2) occurs; and (ii) the absorption coefficient of Oxygen (O2) at standard temperature and pressure that corresponds to the wavelength is less than 25 atm?1 cm?1. In one embodiment, the light is at approximately 121.6 nm, and the light source is a gas discharge light source that produces light at the Hydrogen Lyman-? line.Type: ApplicationFiled: April 5, 2007Publication date: August 9, 2007Inventor: Barry Gelernt
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Patent number: 7218596Abstract: An optical storage device and method of operating that device are disclosed. The device includes an optical storage medium, and a light source capable of generating light that is transmitted to the medium. The light generated by the light source is at a first wavelength that is within the vacuum ultraviolet region of the electromagnetic spectrum and satisfies at least one of the following criteria: (i) the wavelength is within a 1.0 nm-wide window in the vacuum ultraviolet region of the electromagnetic spectrum at which a local minimum in the absorption coefficient of Oxygen (O2) occurs; and (ii) the absorption coefficient of Oxygen (O2) at standard temperature and pressure that corresponds to the wavelength is less than 25 atm?1 cm?1. In one embodiment, the light is at approximately 121.6 nm, and the light source is a gas discharge light source that produces light at the Hydrogen Lyman-? line.Type: GrantFiled: April 15, 2004Date of Patent: May 15, 2007Assignee: Invent Technologies, LLCInventor: Barry Gelernt
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Patent number: 7003215Abstract: A vapor flow controller apparatus for delivery of chemical reagent vapors from a liquid phase source material is provided which includes a source container containing the liquid phase source material, a pump to transport the liquid phase source material to a vaporizor module, the pump having a flow rate controller, and the vaporizer module having a source material inlet, a carrier gas inlet, and a vaporized gas outlet. The vaporizer module converts the liquid phase source material to a vapor. The vapor flow controller apparatus further includes a source material conduit for passage of the liquid phase source material from the source container to the source material inlet of the vaporizer module. The vapor flow controller apparatus further includes a carrier gas container containing a carrier gas and having a carrier gas outlet conduit controlled by a mass flow controller.Type: GrantFiled: January 21, 2002Date of Patent: February 21, 2006Assignee: Air Products and Chemicals, Inc.Inventors: Barry Gelernt, James Clifford Matthews
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Publication number: 20040228158Abstract: An optical storage device and method of operating that device are disclosed. The device includes an optical storage medium, and a light source capable of generating light that is transmitted to the medium. The light generated by the light source is at a first wavelength that is within the vacuum ultraviolet region of the electromagnetic spectrum and satisfies at least one of the following criteria: (i) the wavelength is within a 1.0 nm-wide window in the vacuum ultraviolet region of the electromagnetic spectrum at which a local minimum in the absorption coefficient of Oxygen (O2) occurs; and (ii) the absorption coefficient of Oxygen (O2) at standard temperature and pressure that corresponds to the wavelength is less than 25 atm−1 cm−1. In one embodiment, the light is at approximately 121.6 nm, and the light source is a gas discharge light source that produces light at the Hydrogen Lyman-&agr; line.Type: ApplicationFiled: April 15, 2004Publication date: November 18, 2004Inventor: Barry Gelernt
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Patent number: 6605815Abstract: A method of vacuum ultraviolet (VUV) lithography in which an irradiating wavelength is selected to be in a region of low absorption in air, e.g., one in the vicinity of a local minimum in an oxygen absorption spectrum. In one embodiment, a lithographic exposure wavelength is advantageously selected between 121.0 nm to 122.0 nm, preferably at about 121.6 nm, corresponding to an absorption window in the oxygen spectrum. This method relaxes the otherwise stringent vacuum and inert gas purge requirement imposed on a VUV lithographic tool.Type: GrantFiled: March 11, 2002Date of Patent: August 12, 2003Inventor: Barry Gelernt
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Publication number: 20030138242Abstract: A vapor flow controller apparatus for delivery of chemical reagent vapors from a liquid phase source material is provided which includes a source container containing the liquid phase source material, a pump to transport the liquid phase source material to a vaporizor module, the pump having a flow rate controller, and the vaporizer module having a source material inlet, a carrier gas inlet, and a vaporized gas outlet. The vaporizer module converts the liquid phase source material to a vapor. The vapor flow controller apparatus further includes a source material conduit for passage of the liquid phase source material from the source container to the source material inlet of the vaporizer module. The vapor flow controller apparatus further includes a carrier gas container containing a carrier gas and having a carrier gas outlet conduit controlled by a mass flow controller.Type: ApplicationFiled: January 21, 2002Publication date: July 24, 2003Inventors: Barry Gelernt, James Clifford Matthews
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Publication number: 20030054561Abstract: A method and apparatus for determining ammoniacal species concentration in a gas sample. In one embodiment, trace concentration of ammonia in an air sample is determined by monitoring emission intensity from an excited radical species (NH*), which is produced in a reaction between ammonia and fluorine. The observed emission intensity is compared with calibration data obtained from previously analyzed gas samples containing ammonia. The method and apparatus can also be adapted to detect ammoniacal species concentration in other NH-containing gas samples.Type: ApplicationFiled: October 17, 2002Publication date: March 20, 2003Inventor: Barry Gelernt
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Patent number: 6509194Abstract: A method and apparatus for determining ammoniacal species concentration in a gas sample. In one embodiment, trace concentration of ammonia in an air sample is determined by monitoring emission intensity from an excited radical species (NH*), which is produced in a reaction between ammonia and fluorine. The observed emission intensity is compared with calibration data obtained from previously analyzed gas samples containing ammonia. The method and apparatus can also be adapted to detect ammoniacal species concentration in other NH-containing gas samples.Type: GrantFiled: July 24, 2000Date of Patent: January 21, 2003Inventor: Barry Gelernt
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Publication number: 20020125445Abstract: A method of vacuum ultraviolet (VUV) lithography in which an irradiating wavelength is selected to be in a region of low absorption in air, e.g., one in the vicinity of a local minimum in an oxygen absorption spectrum. In one embodiment, a lithographic exposure wavelength is advantageously selected between 121.0 nm to 122.0 nm, preferably at about 121.6 nm, corresponding to an absorption window in the oxygen spectrum.Type: ApplicationFiled: March 11, 2002Publication date: September 12, 2002Inventor: Barry Gelernt
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Patent number: 6369398Abstract: A method of vacuum ultraviolet (VUV) lithography in which an irradiating wavelength is selected to be in a region of low absorption in air, e.g., one in the vicinity of a local minimum in an oxygen absorption spectrum. In one embodiment, a lithographic exposure wavelength is advantageously selected between 121.0 nm to 122.0 nm, preferably at about 121.6 nm, corresponding to an absorption window in the oxygen spectrum. This method relaxes the otherwise stringent vacuum and inert gas purge requirement imposed on a VUV lithographic tool.Type: GrantFiled: March 29, 1999Date of Patent: April 9, 2002Inventor: Barry Gelernt
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Patent number: 4479927Abstract: Aluminum chloride gases and other gases from a processing system are directed to a cold trap including a blower connected thereto. The blower directs the gases, except for the aluminum chloride, out of the cold trap. The aluminum chloride is solidified in the trap. Means including a heater are provided to convert the solid aluminum chloride to a vapor and selectively empty the aluminum chloride out of the cold trap into another trap associated with means for chemically treating the aluminum chloride. The cold trap is then cooled and ready to receive additional aluminum chloride from the processing system.Type: GrantFiled: August 9, 1982Date of Patent: October 30, 1984Assignee: The Perkin-Elmer CorporationInventor: Barry Gelernt
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Patent number: 4415402Abstract: A method for determining the completion of removal by plasma etching of phosphorus doped silicon dioxide from an underlying substrate.Type: GrantFiled: April 2, 1981Date of Patent: November 15, 1983Assignee: The Perkin-Elmer CorporationInventors: Barry Gelernt, C. Wallace Wang
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Patent number: 4383431Abstract: An apparatus for automatically compensating for deviation of a capacitance manometer reading from true pressure. The capacitance manometer is connected to a source of pressure having a value less than the pressure the capacitance manometer is capable of reading and the indicated pressure is stored as a correction factor. Thereafter, each pressure read by the manometer is adjusted by the correction factor.Type: GrantFiled: November 3, 1980Date of Patent: May 17, 1983Assignee: The Perkin-Elmer CorporationInventor: Barry Gelernt