Abstract: A manufacturing system configured for automated operational state tracking and management includes an automated manufacturing execution system (MES) in communication with manufacturing equipment, equipment integration software (EIS) configured to provide an interface between the MES and the manufacturing equipment, and a plug-in module in operable communication with the EIS. The plug-in module is configured to automatically obtain information regarding rules for changing defined operational states, and to receive triggering event information from the manufacturing equipment. The plug-in module is further configured to compare the triggering event information with the rules, and to change the present operational state of the manufacturing equipment in accordance with the rules.

Abstract: A software module for use within an integrated circuit fabrication facility sends commands to a tool according to a method that operates with any tool that satisfies SEMI standards to add or subtract steps in a process without reprogramming or recompiling. The program operates autonomously to change parameters of commands that it sends to the tool to improve performance of the fab.