Patents by Inventor Barry MOEST

Barry MOEST has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC METHOD
    Publication number: 20190235392
    Abstract: A lithographic apparatus has a support structure constructed to support a patterning device and associated pellicle, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, and a projection system configured to project the patterned radiation beam onto a target portion of a substrate, wherein the support structure is located in a housing and wherein pressure sensors are located in the housing.
    Type: Application
    Filed: June 29, 2017
    Publication date: August 1, 2019
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Andre Bernardus JEUNINK, Laurentius Johannes Adrianus VAN BOKHOVEN, Stan Henricus VAN DER MEULEN, Yang-Shan HUANG, Federico LA TORRE, Barry MOEST, Stefan Carolus Jacobus Antonius KEIJ, Enno VAN DEN BRINK, Christine Henriette SCHOUTEN, Hoite Pieter Theodoor TOLSMA