Patents by Inventor Barry N. Casowitz

Barry N. Casowitz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4100486
    Abstract: An electrical defect density monitor for semiconductor device fabrication utilizing a silicide of a formed transitional metal (such as platinum silicide) on a surface of a silicon substrate as a resistor in parallel with the resistance of the underlying substrate, including diffused regions, to improve measurement sensitivity of high sheet resistivity areas. The measurement can be employed for measuring the integrity of diffused regions and/or of dielectric coatings.
    Type: Grant
    Filed: March 11, 1977
    Date of Patent: July 11, 1978
    Assignee: International Business Machines Corporation
    Inventors: Barry N. Casowitz, Michael D. Cowan, Charles B. Humphreys, Akella V. S. Satya