Patents by Inventor Barry R. Bowman

Barry R. Bowman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6882413
    Abstract: An ellipsometric apparatus provides a rotating focused probe beam directed to impinge a sample in any direction. A rotating stage rotates the wafer into a linear travel range defined by a single linear axis of a single linear stage. As a result, an entire wafer is accessed for measurement with the single linear stage having a travel range of only half the wafer diameter. The reduced single linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of a rotating probe beam permits measurement of periodic structures along a preferred direction while permitting the use of a single reduced motion stage.
    Type: Grant
    Filed: May 13, 2002
    Date of Patent: April 19, 2005
    Assignee: Therma-Wave, Inc.
    Inventor: Barry R. Bowman
  • Publication number: 20030147076
    Abstract: An ellipsometric apparatus provides a rotating focused probe beam directed to impinge a sample in any direction. A rotating stage rotates the wafer into a linear travel range defined by a single linear axis of a single linear stage. As a result, an entire wafer is accessed for measurement with the single linear stage having a travel range of only half the wafer diameter. The reduced single linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of a rotating probe beam permits measurement of periodic structures along a preferred direction while permitting the use of a single reduced motion stage.
    Type: Application
    Filed: May 13, 2002
    Publication date: August 7, 2003
    Inventor: Barry R. Bowman
  • Patent number: 5191940
    Abstract: An oil/gas separator is disclosed that can be utilized to return the burning wells in Kuwait to production. Advantageously, a crane is used to install the separator at a safe distance from the well. The gas from the well is burned off at the site, and the oil is immediately pumped into Kuwait's oil gathering system. Diverters inside the separator prevent the oil jet coming out of the well from reaching the top vents where the gas is burned. The oil falls back down, and is pumped from an annular oil catcher at the bottom of the separator, or from the concrete cellar surrounding the well.
    Type: Grant
    Filed: August 22, 1991
    Date of Patent: March 9, 1993
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Carol T. Alonso, Donald A. Bender, Barry R. Bowman, Alan K. Burnham, Dwayne A. Chesnut, William J. Comfort, III, Lloyd G. Guymon, Carl D. Henning, Knud B. Pedersen, Joseph A. Sefcik, Joseph A. Smith, Mark S. Strauch