Patents by Inventor Barry S. McCoy

Barry S. McCoy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modulated exposure mask and method of using a modulated exposure mask
    Patent number: 6613498
    Abstract: A photolithographic process includes providing a layer of photoresistive material on a target substrate. Radiation is transmitted to the photoresistive material through a layer of absorbing material that absorbs the radiation with a transmittance proportional to the thickness of the absorbing material. A surface relief structure is formed in the absorbing material, so that the photoresistive material is only partially exposed in a pattern corresponding to the surface relief structure. Thus, when the photoresistive material is developed, it has a surface relief structure corresponding to the surface relief structure in the absorbing material. Etching the developed photoresistive material and target substrate then forms a surface relief structure in the target substrate that corresponds to the surface relief structure in the developed photoresistive material.
    Type: Grant
    Filed: September 16, 1999
    Date of Patent: September 2, 2003
    Assignee: MEMS Optical LLC
    Inventors: David R. Brown, Barry S. McCoy, Gerald Tuck, Miles Scott, Bruce Peters