Patents by Inventor Bart J. Schravendijk

Bart J. Schravendijk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Treatment of low K films with a silylating agent for damage repair
    Patent number: 8034638
    Abstract: The present invention provides methods of repairing damage to low-k dielectric film that is incurred by commonly used processes in IC fabrication. The methods may be integrated into an IC fabrication process flow at various stages. According to various embodiments, the methods of involve performing an IC fabrication process on a wafer on which a low-k film is deposited, and subsequently treating the film with a silylating agent to repair the damage done to the film during the process. Damage repair may be performed after one or more of the damaging process steps.
    Type: Grant
    Filed: May 7, 2009
    Date of Patent: October 11, 2011
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. Schravendijk, Justin F. Gaynor