Abstract: A system and method for forming one or more nanometer sized openings in a detecting region of an object, such as a semiconductor device that is used for identifying the individual mers of long-chain polymers, such as carbohydrates and proteins, as well as individual bases of deoxyribonucleic acid (DNA) or ribonucleic acid (RNA), to thus enable sequencing of the strand to be performed. The system and method employ the operations of positioning a mask pattern including a plurality of mask lines at a first orientation with respect to the mask on the semiconductor, and imposing the mask pattern on the mask to create first mask lines extending in a first direction along the mask.

Abstract: A system and method employing at least one semiconductor device having at least one detecting region which can include, for example, a recess or opening therein, for detecting a charge representative of a component of a polymer, such as a nucleic acid strand, proximate to the detecting region, and a method for manufacturing such a semiconductor device. The system and method can thus be used for sequencing individual nucleotides or bases of ribonucleic acid (RNA) or deoxyribonucleic acid (DNA). The semiconductor device includes at least two doped regions, such as two n-type regions implanted in a p-type semiconductor layer or two p-type regions implanted in an n-type semiconductor layer. The detecting region permits a current to pass between the two doped regions in response to the presence of the component of the polymer, such as a base of a DNA or RNA strand.