Patents by Inventor Bart LANENS

Bart LANENS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IMPROVEMENTS IN GAUGE PATTERN SELECTION
    Publication number: 20180364589
    Abstract: A method including obtaining a plurality of gauges of a plurality of gauge patterns for a patterning process, each gauge pattern configured for measurement of a parameter of the patterning process when created as part of the patterning process, and creating a selection of one or more gauges from the plurality of gauges, wherein a gauge is included in the selection provided the gauge and all the other gauges, if any, of the same gauge pattern, or all of the one or more gauges of the same gauge pattern linked to the gauge, pass a gauge printability check.
    Type: Application
    Filed: November 30, 2016
    Publication date: December 20, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jun CHEN, Thomas I. WALLOW, Bart LANENS, Yi-Hsing PENG