Patents by Inventor Bart Lindeboom

Bart Lindeboom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS INJECTOR
    Publication number: 20240167157
    Abstract: A gas injector and a semiconductor processing apparatus comprising the gas injector is disclosed. Embodiments of the presently described gas injector comprise an injector tube to inject a process gas to a process chamber of the semiconductor processing apparatus. The gas injector further comprises a cooling fluid conduit constructed and arranged to cool the injector tube.
    Type: Application
    Filed: November 14, 2023
    Publication date: May 23, 2024
    Inventors: Theodorus G.M. Oosterlaken, Bert Jongbloed, Radko Bankras, Bart Lindeboom