Patents by Inventor Bart Sakry

Bart Sakry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF ELECTROCHEMICAL DEPOSITION FOR VOID-FREE GAP FILL
    Publication number: 20180171502
    Abstract: A method of electroplating on a workpiece having at least one sub-30 nm feature includes applying a first electrolyte chemistry to the workpiece, the chemistry including a metal cation solute species having a concentration in the range of about 50 mM to about 250 mM and a suppressor resulting in polarization greater than 0.75 V and reaching 0.75 V of polarization at a rate greater than 0.25 V/s, and applying an electric waveform, wherein the electric waveform includes a period of ramping up of current followed by a period of partial ramping down of current.
    Type: Application
    Filed: December 15, 2016
    Publication date: June 21, 2018
    Applicant: APPLIED Materials, Inc.
    Inventors: Serdar Aksu, Jung Gu Lee, Bart Sakry, Roey Shaviv
  • Methods of electrochemical deposition for void-free gap fill
    Patent number: 10000860
    Abstract: A method of electroplating on a workpiece having at least one sub-30 nm feature includes applying a first electrolyte chemistry to the workpiece, the chemistry including a metal cation solute species having a concentration in the range of about 50 mM to about 250 mM and a suppressor resulting in polarization greater than 0.75 V and reaching 0.75 V of polarization at a rate greater than 0.25 V/s, and applying an electric waveform, wherein the electric waveform includes a period of ramping up of current followed by a period of partial ramping down of current.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: June 19, 2018
    Assignee: APPLIED Materials, Inc.
    Inventors: Serdar Aksu, Jung Gu Lee, Bart Sakry, Roey Shaviv