Patents by Inventor Bart Visser

Bart Visser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Correction using stack difference
    Patent number: 10635004
    Abstract: A method including obtaining a fit of data for overlay of a metrology target for a patterning process as a function of a stack difference parameter of the metrology target; and using, by a hardware computer, a slope of the fit (i) to differentiate a metrology target measurement recipe from another metrology target measurement recipe, or (ii) calculate a corrected value of overlay, or (iii) to indicate that an overlay measurement value obtained using the metrology target should be used, or not be used, to configure or modify an aspect of the patterning process, or (iv) any combination selected from (i)-(iii).
    Type: Grant
    Filed: November 9, 2017
    Date of Patent: April 28, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Aiqin Jiang, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Hans Van Der Laan, Bart Visser, Martin Jacobus Johan Jak
  • CORRECTION USING STACK DIFFERENCE
    Publication number: 20180129139
    Abstract: A method including obtaining a fit of data for overlay of a metrology target for a patterning process as a function of a stack difference parameter of the metrology target; and using, by a hardware computer, a slope of the fit (i) to differentiate a metrology target measurement recipe from another metrology target measurement recipe, or (ii) calculate a corrected value of overlay, or (iii) to indicate that an overlay measurement value obtained using the metrology target should be used, or not be used, to configure or modify an aspect of the patterning process, or (iv) any combination selected from (i)-(iii).
    Type: Application
    Filed: November 9, 2017
    Publication date: May 10, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Aiqin JIANG, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Hans Van Der Laan, Bart Visser, Martin Jacobus Johan Jak
  • Method for producing low porosity nonoxide ceramics
    Patent number: 9884788
    Abstract: The present invention relates to a method of producing ultra-high melting point nonoxide ceramics with low porosity based on sintering at low temperatures of below about 1000° C. with low DC electric fields of less than about 100 V/cm.
    Type: Grant
    Filed: February 2, 2015
    Date of Patent: February 6, 2018
    Assignees: RUTGERS, THE STATE UNIVERSITY OF NEW JERSEY, OFFICE OF NAVAL RESEARCH
    Inventors: Thomas Tsakalakos, Enver K. Akdogan, Ilyas Savkliyildiz, Hulya Bicer, Lawrence Kabacoff, Bart Visser, William Paxton
  • METHOD FOR PRODUCING LOW POROSITY NONOXIDE CERAMICS
    Publication number: 20160016857
    Abstract: The present invention relates to a method of producing ultra-high melting point nonoxide ceramics with low porosity based on sintering at low temperatures of below about 1000° C. with low DC electric fields of less than about 100 V/cm.
    Type: Application
    Filed: February 2, 2015
    Publication date: January 21, 2016
    Inventors: Thomas Tsakalakos, Enver K. Akdogan, Ilyas Savkliyildiz, Hulya Bicer, Lawrence Kabacoff, Bart Visser, William Paxton