Patents by Inventor Bartholomeus Hendricus Koek

Bartholomeus Hendricus Koek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7760324
    Abstract: An immersion lithographic projection apparatus includes a shutter member is employed to block a liquid supply system during substrate swap to ensure that liquid remains in contact with an element of the projection system during substrate swap. The shutter member is connected to a metrology frame which also supports the projection system. In this way the position of the shutter member is always known.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: July 20, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Jozef Petrus Henricus Benschop, Hans Butler, Nicolaas Rudolf Kemper, Bartholomeus Hendricus Koek, Frits Van Der Meulen, Harmen Klaas Van Der Schoot