Patents by Inventor Barton M. Hetrick

Barton M. Hetrick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for developing negative photoresists
    Patent number: 4886727
    Abstract: A process is provided for developing images in exposed negative photoresists which comprises treating a substrate coated with the photoresist with a mixture of trichloroethane and from about 5 weight % to about 17 weight % of an aliphatic alcohol, preferably isopropanol or tert-butanol, which is heated to an elevated temperature. The alcohol is present in an amount up to that forming a constant boiling composition (azeotropic compositions).
    Type: Grant
    Filed: October 21, 1988
    Date of Patent: December 12, 1989
    Assignee: International Business Machines Corporation
    Inventors: Morris Anschel, Lawrence D. Goodrich, Barton M. Hetrick