Patents by Inventor Baruch Pletner

Baruch Pletner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6791098
    Abstract: A multi-input, multi-output vibration control system for a lithography system. The system provides an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The system includes a processor programmed with a multi-input, multi-output control technique such as a linear quadratic Gaussian, H-infinity or mu synthesis. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: September 14, 2004
    Assignee: Cymer, Inc.
    Inventors: Baruch Pletner, Richard Perkins, Leonard Lublin
  • Patent number: 6563128
    Abstract: A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base on which equipment is mounted. The system also includes at least three air mounts and a plurality of actuators all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.
    Type: Grant
    Filed: February 11, 2002
    Date of Patent: May 13, 2003
    Assignee: Cymer, Inc.
    Inventors: Leonard Lublin, David J. Warkentin, Baruch Pletner, John A. Rule
  • Publication number: 20030047693
    Abstract: A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base on which equipment is mounted. The system also includes at least three air mounts and a plurality of actuators all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.
    Type: Application
    Filed: February 11, 2002
    Publication date: March 13, 2003
    Inventors: Leonard Lublin, David J. Warkentin, Baruch Pletner, John A. Rule
  • Publication number: 20030040818
    Abstract: A vibration control system which comprises an actuator assembly, serves to replace the friction block entirely while improving settling time, or, alternatively, to operate in conjunction with the friction block, providing additional accuracy or speed of operation. In a preferred embodiment of the invention special dynamic modeling techniques are utilized to investigate structural movements and to provide precise motion control.
    Type: Application
    Filed: March 22, 2002
    Publication date: February 27, 2003
    Inventors: Baruch Pletner, Mordechay Karpel, Huckleberry B. Dorn, Richard Perkins, Leonard Lublin
  • Publication number: 20020101253
    Abstract: A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.
    Type: Application
    Filed: March 9, 2001
    Publication date: August 1, 2002
    Inventors: Baruch Pletner, Richard Perkins, Leonard Lublin