Patents by Inventor Bas Pieter Lemmen

Bas Pieter Lemmen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator
    Patent number: 10372045
    Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: August 6, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Antonius Gerardus Akkermans, Bas Pieter Lemmen, Sjoerd Martijn Huiberts, Joeri Lof, Petrus Theodorus Rutgers, Sven Antoin Johan Hol, Harmeet Singh, Peter Michel Silvester Maria Heijmans
  • Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator
    Publication number: 20150234297
    Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.
    Type: Application
    Filed: August 26, 2013
    Publication date: August 20, 2015
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes Antonius Gerardus Akkermans, Bas Pieter Lemmen, Sjoerd Martijn Huiberts, Joeri Lof, Petrus Theodorus Rutgers, Sven Antoin Johan Hol, Harmeet Singh, Peter Michel Silvester Maria Heijmans