Abstract: A method is provided for detecting a mechanical end stop of a motion system comprising a base designed to receive a motion stage, a machine frame and an active isolation system comprising actuators arranged to impart a six degree-of-freedom (DOF) motion to the base, inertial sensors arranged to provide a six DOF measurement, the mechanical end stop being arranged to limit the base's motion relative to the machine frame. The method includes selecting a translational DOF, and determining, using a process sensitivity matrix of a mechanical system comprising the base and the active isolation system, a force to be applied to the base by the actuators to cause an oscillatory motion of the base in the translational DOF. The method further includes applying the force to obtain the oscillatory motion, and detecting a mechanical contact between the base and the mechanical end stop using the inertial sensors.

Abstract: A diagnostic method localizes technical faults in a motion system that includes a base adapted to receive a motion stage for equipment, a machine frame resting on the floor, dampers adapted to support the base, and an active isolation system arranged between the base and the machine frame. The active isolation system and the base form a mechanical system. The active isolation system includes actuators, adapted to impart six degree-of-freedom (DOF) motion to the base in a reference frame, and inertial sensors adapted to provide a six DOF measurement of the base's motion.

Abstract: A motion system includes a motion hardware system and a motion control system configured to control the movement of the motion hardware system. The hardware system includes a motion stage, a platform supporting the motion stage, and a machine frame resting on a ground surface. The platform includes a base and an active vibration isolation system arranged between the base and the machine frame. The active vibration isolation system includes actuators to provide together at least three degrees-of-freedom actuation of the base. The motion control system includes a feedforward control having a vibration isolation system controller for controlling the at least three DOF actuation of the active vibration isolation system to compensate, by exerting a counteracting force on the base, for expected reactions forces exerted by the motion stage on the base when operating.