Abstract: An ion energy for plasma processing of a dielectric substrate is determined by exposing the dielectric substrate to a plasma discharge and applying a pulsed voltage waveform. This waveform includes a sequence of pulses, each having a higher voltage interval and a lower voltage interval having a voltage slope. First pulses of the sequence having differing voltage slopes are generated and applied to the dielectric substrate. For each first pulse, the voltage slope and a corresponding output current are determined. For each first pulse, at least one coefficient of a mathematical relation between the voltage slope and the corresponding output current based solely on the voltage slope and the output current determined for one or more of the first pulses is determined. A test function is applied and an optimal voltage slope value corresponding to the at least one coefficient making the test function true is selected.

Abstract: Some embodiments are directed to an AC/DC converter comprising a first AC terminal for connection to a first AC circuit terminal, a neutral line terminal for connection to a neutral AC circuit terminal, a common node, a first AC side active bridge coupled between the first AC terminal and the common node, and a neutral voltage lift capacitor coupled between the neutral line terminal and the common node. The converter comprises first and second DC terminals, and a capacitor between the first and second terminals. A DC-side active bridge is coupled between the first and second terminals. An inductor is coupled between switchable nodes of the first AC side active bridge and the DC side active bridge. A controller is arranged to control the first AC side active bridge and the DC-side active bridge so to alternate voltage across the first AC terminal and the neutral line terminal.

Abstract: Some embodiments are directed to an AC/DC converter comprising a first AC terminal for connection to a first AC circuit terminal, a neutral line terminal for connection to a neutral AC circuit terminal, a common node, a first AC side active bridge coupled between the first AC terminal and the common node, and a neutral voltage lift capacitor coupled between the neutral line terminal and the common node. The converter comprises first and second DC terminals, and a capacitor between the first and second terminals. A DC-side active bridge is coupled between the first and second terminals. An inductor is coupled between a switchable nodes of the first AC side active bridge and the DC side active bridge. A controller is arranged to control the first AC side active bridge and the DC-side active bridge so to alternate voltage across the first AC terminal and the neutral line terminal.