Patents by Inventor Bastiaan Lambertus Wilhemus Marinus Van De Ven

Bastiaan Lambertus Wilhemus Marinus Van De Ven has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured thereby
    Patent number: 7153612
    Abstract: A mask for use in a lithographic projection apparatus comprises three brackets arranged on the circumference of the mask. The brackets are provided with grooves directed to a common imaginary point and are intend to cooperate with three pins provided on a mask gripper present in a mask handling apparatus or device. Preferably, the pins are provided with a rounded top for insertion in associated grooves of the brackets to provide a kinematically-determined mechanical position of the mask on the gripper.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: December 26, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Gart-Jan Heerens, Erik Leonardus Ham, Bastiaan Lambertus Wilhemus Marinus Van De Ven