Patents by Inventor Bastiaan S H Jansen

Bastiaan S H Jansen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7307262
    Abstract: A lithographic apparatus includes a projection system including a movable optical element. The movable optical element is capable, by a displacement thereof to influence a position quantity of a radiation beam projected by the projection system. A control device is provided to drive the optical element actuator to influence a position quantity of the movable optical element, thereby influencing a position quantity of the radiation beam as projected by the projection system. The control device is adapted to move the movable optical element to position the radiation beam as projected by the projection system with respect to the substrate, or to correct a position quantity of the radiation beam as projected by the projection system caused by any type of disturbance on the projection system.
    Type: Grant
    Filed: December 23, 2004
    Date of Patent: December 11, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Robertus Johannes Marinus De Jongh, Jacob Kleijn, Bastiaan S H Jansen, Marc Van Der Wijst