Patents by Inventor Beate Volkmann

Beate Volkmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of sample preparation for electron microscopy
    Patent number: 6303399
    Abstract: A method is provided for preparing a sample for cross-section analysis by a transmission electron microscope. Semiconductor samples containing recessed portions or unfilled structures are filled with a filling material so as to produce a planar top surface onto which a metal layer can be deposited for thinning the sample to a thickness of less than 100 nm by an FIB technique.
    Type: Grant
    Filed: March 6, 2001
    Date of Patent: October 16, 2001
    Assignee: Advanced Micro Devices Inc.
    Inventors: Hans-Juergen Engelmann, Beate Volkmann, Ehrenfried Zschech