Abstract: A holographic optical element is provided for measuring the dimension and position of an object with aid of a deflected laser beam generated by a monochromatic and coherent laser light source that sweeps across an angular range to produce a fan-shaped reference wave front. The element includes at least two interference patterns. Each interference pattern is created through simultaneous exposure of the element to the fan-shaped reference wave front generated by the monochromatic and coherent laser light source and a parallel partial wave front generated by the same monochromatic and coherent laser light source and hitting the element at a different angle than the reference wave front. The number of parallel partial wave fronts used for the exposure of the element corresponds to the number of interference patterns, and if the parallel partial wave fronts are virtually extended through the holographic optical element, they intersect behind the element in a center of a measuring field.

Abstract: Laser beams from separate sources are deflected by a rotating mirror and travel over further mirrors and objective lenses into a measuring field for measuring the dimensions of an object 3 in the x and y directions. The result is a simple, compact configuration. The separate optical systems for both measuring directions can be set in an optimum manner independently of one another, permitting great precision. Thanks to an offset of the optical axis of the incident laser beams relative to the rotation axis of the mirror the measurements in the two directions are made staggered in time so that the measurement signals can be processed in a common measuring channel.

Abstract: A light beam is repeatedly deflected in the longitudinal direction through a holographic element HOE by means of a rotating multi-faceted mirror. This HOE is so formed that the beam entering at different angles leaves the HOE as a telecentric beam. Through a further HOE the telecentric beam is diffracted onto an opto-electric transducer. In the region of the telecentric beam is located an object to be measured, and the time of the interruption of the telecentric beam by means of this object enables the dimension of the latter to be determined. The production of the telecentric beam and the deflection of the latter onto the transducer by means of the HOE allows a simple cost-effect manufacture as well as a simple evaluation of the measurements with increased precision. The manufacture of the HOE is likewise simple.

Abstract: A light beam is repeatedly deflected in the longitudinal direction through a holographic element HOE by means of a rotating multi-faceted mirror. This HOE is so formed that the beam entering at different angles leaves the HOE as a telecentric beam. Through a further HOE the telecentric beam is diffracted onto an electro-optic transducer. In the region of the telecentric beam is located an object to be measured, and the time of the interruption of the telecentric beam by means of this object enables the dimension of the latter to be determined. The production of the telecentric beam and the deflection of the latter onto the transducer by means of the HOE allows a simple cost-effect manufacture as well as a simple evalution of the measurements with increased precision. The manufacture of the HOE is likewise simple.