Patents by Inventor Been Chen

Been Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer supporting device of a sputtering apparatus
    Patent number: 8062487
    Abstract: A wafer supporting device of a sputter apparatus includes a pedestal positioned in a sputtering chamber and used to load a wafer for sputtering, a deposition ring having a recess positioned on a peripheral portion of the pedestal, and a cover ring positioned on the pedestal and the deposition ring. The cover ring has a gate corresponding to the recess.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: November 22, 2011
    Assignee: United Microelectronics Corp.
    Inventors: Chi-Piao Cheng, Li-Chun Liang, Yu-Jen Huang, Been Chen, Sheng-Yih Ting
  • WAFER SUPPORTING DEVICE OF A SPUTTERING APPARATUS
    Publication number: 20080317564
    Abstract: A wafer supporting device of a sputter apparatus includes a pedestal positioned in a sputtering chamber and used to load a wafer for sputtering, a deposition ring having a recess positioned on a peripheral portion of the pedestal, and a cover ring positioned on the pedestal and the deposition ring. The cover ring has a gate corresponding to the recess.
    Type: Application
    Filed: June 25, 2007
    Publication date: December 25, 2008
    Inventors: Chi-Piao Cheng, Li-Chun Liang, Yu-Jen Huang, Been Chen