Patents by Inventor Been-Yih Jin

Been-Yih Jin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10304929
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Grant
    Filed: July 14, 2017
    Date of Patent: May 28, 2019
    Assignee: Intel Corporation
    Inventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
  • Patent number: 10141437
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: November 27, 2018
    Assignee: Intel Corporation
    Inventors: Suman Datta, Mantu K. Hudait, Mark L. Doczy, Jack T. Kavalieros, Amlan Majumdar, Justin K. Brask, Been-Yih Jin, Matthew V. Metz, Robert S. Chau
  • Patent number: 9876014
    Abstract: A quantum well transistor has a germanium quantum well channel region. A silicon-containing etch stop layer provides easy placement of a gate dielectric close to the channel. A group III-V barrier layer adds strain to the channel. Graded silicon germanium layers above and below the channel region improve performance. Multiple gate dielectric materials allow use of a high-k value gate dielectric.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: January 23, 2018
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Been-Yih Jin, Benjamin Chu-Kung, Matthew V. Metz, Jack T. Kavalieros, Marko Radosavljevic, Roza Kotlyar, Willy Rachmady, Niloy Mukherjee, Gilbert Dewey, Robert S. Chau
  • Publication number: 20170317172
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Application
    Filed: July 14, 2017
    Publication date: November 2, 2017
    Inventors: Jack T. KAVALIEROS, Nancy ZELICK, Been-Yih JIN, Markus KUHN, Stephen M. CEA
  • Publication number: 20170309734
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Application
    Filed: June 16, 2017
    Publication date: October 26, 2017
    Inventors: Suman DATTA, Mantu K. HUDAIT, Mark L. DOCZY, Jack T. KAVALIEROS, Amlan MAJUMDAR, Justin K. BRASK, Been-Yih JIN, Matthew V. METZ, Robert S. CHAU
  • Patent number: 9711598
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Grant
    Filed: July 21, 2016
    Date of Patent: July 18, 2017
    Assignee: Intel Corporation
    Inventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
  • Patent number: 9691856
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: June 27, 2017
    Assignee: Intel Corporation
    Inventors: Suman Datta, Mantu K. Hudait, Mark L. Doczy, Jack T. Kavalieros, Amlan Majumdar, Justin K. Brask, Been-Yih Jin, Matthew V. Metz, Robert S. Chau
  • Patent number: 9548363
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Grant
    Filed: June 11, 2014
    Date of Patent: January 17, 2017
    Assignee: Intel Corporation
    Inventors: Suman Datta, Mantu K. Hudait, Mark L. Doczy, Jack T. Kavalieros, Majumdar Amian, Justin K. Brask, Been-Yih Jin, Matthew V. Metz, Robert S. Chau
  • Publication number: 20170012116
    Abstract: A quantum well transistor has a germanium quantum well channel region. A silicon-containing etch stop layer provides easy placement of a gate dielectric close to the channel. A group III-V barrier layer adds strain to the channel. Graded silicon germanium layers above and below the channel region improve performance. Multiple gate dielectric materials allow use of a high-k value gate dielectric.
    Type: Application
    Filed: September 20, 2016
    Publication date: January 12, 2017
    Applicant: Intel Corporation
    Inventors: Ravi Pillarisetty, Been-Yih Jin, Benjamin Chu-Kung, Matthew V. Metz, Jack T. Kavalieros, Marko Radosavljevic, Roza Kotlyar, Willy Rachmady, Niloy Mukherjee, Gilbert Dewey, Robert S. Chau
  • Publication number: 20160329403
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Application
    Filed: July 21, 2016
    Publication date: November 10, 2016
    Inventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
  • Patent number: 9478635
    Abstract: A quantum well transistor has a germanium quantum well channel region. A silicon-containing etch stop layer provides easy placement of a gate dielectric close to the channel. A group III-V barrier layer adds strain to the channel. Graded silicon germanium layers above and below the channel region improve performance. Multiple gate dielectric materials allow use of a high-k value gate dielectric.
    Type: Grant
    Filed: October 27, 2015
    Date of Patent: October 25, 2016
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Been-Yih Jin, Benjamin Chu-Kung, Matthew V. Metz, Jack T. Kavalieros, Marko Radosavljevic, Roza Kotlyar, Willy Rachmady, Niloy Mukherjee, Gilbert Dewey, Robert S. Chau
  • Patent number: 9425256
    Abstract: A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In another embodiment, a semiconductor region with a crystalline lattice of one or more species of charge-neutral lattice-forming atoms imparts a strain to a crystalline substrate, wherein the lattice constant of the semiconductor region is different from that of the crystalline substrate, and wherein all species of charge-neutral lattice-forming atoms of the semiconductor region are contained in the crystalline substrate.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: August 23, 2016
    Assignee: Intel Corporation
    Inventors: Suman Datta, Jack T. Kavalieros, Been-Yih Jin
  • Patent number: 9419140
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Grant
    Filed: October 13, 2015
    Date of Patent: August 16, 2016
    Assignee: Intel Corporation
    Inventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
  • Patent number: 9343302
    Abstract: A method to provide a transistor or memory cell structure. The method comprises: providing a substrate including a lower Si substrate and an insulating layer on the substrate; providing a first projection extending above the insulating layer, the first projection including an Si material and a Si1?xGex material; and exposing the first projection to preferential oxidation to yield a second projection including a center region comprising Ge/Si1?yGey and a covering region comprising SiO2 and enclosing the center region.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: May 17, 2016
    Assignee: Intel Corporation
    Inventors: Been-Yih Jin, Brian S. Doyle, Jack T. Kavalieros, Robert S. Chau
  • Publication number: 20160111423
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Inventors: Suman Datta, Mantu K. Hudait, Mark L. Doczy, Jack T. Kavalieros, Majumdar AmIan, Justin K. Brask, Been-Yih Jin, Matthew V. Metz, Robert S. Chau
  • Publication number: 20160049513
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Application
    Filed: October 13, 2015
    Publication date: February 18, 2016
    Inventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
  • Patent number: 9263557
    Abstract: Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: February 16, 2016
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Jack T. Kavalieros, Willy Rachmady, Uday Shah, Benjamin Chu-Kung, Marko Radosavljevic, Niloy Mukherjee, Gilbert Dewey, Been-Yih Jin, Robert S. Chau
  • Patent number: 9159835
    Abstract: Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
    Type: Grant
    Filed: June 4, 2012
    Date of Patent: October 13, 2015
    Assignee: Intel Corporation
    Inventors: Jack T. Kavalieros, Nancy Zelick, Been-Yih Jin, Markus Kuhn, Stephen M. Cea
  • Patent number: 9048266
    Abstract: Embodiments of an apparatus and methods of providing a quantum well device for improved parallel conduction are generally described herein. Other embodiments may be described and claimed.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: June 2, 2015
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Mantu Hudait, Been-Yih Jin, Benjamin Chu-Kung, Robert Chau
  • Publication number: 20150099349
    Abstract: A method to provide a transistor or memory cell structure. The method comprises: providing a substrate including a lower Si substrate and an insulating layer on the substrate; providing a first projection extending above the insulating layer, the first projection including an Si material and a Si1?xGex material; and exposing the first projection to preferential oxidation to yield a second projection including a center region comprising Ge/Si1?yGey and a covering region comprising SiO2 and enclosing the center region.
    Type: Application
    Filed: December 16, 2014
    Publication date: April 9, 2015
    Inventors: Been-Yih Jin, Brian S. Doyle, Jack T. Kavalieros, Robert S. Chau