Patents by Inventor Behnam BEHZIZ

Behnam BEHZIZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTROSTATIC CHUCKS WITH SELF-SEALING GAS CONDUITS AND/OR REDUCED CLOGGING DUE TO RESIDUE
    Publication number: 20250062149
    Abstract: An electrostatic chuck for a substrate includes a baseplate including a first surface and a cavity arranged on the first surface. A top plate includes a first plug. A first spring member is arranged in the cavity. A second plug is arranged between the top plate and the first spring member. A bonding material attaches the top plate to the first surface of the baseplate.
    Type: Application
    Filed: December 15, 2022
    Publication date: February 20, 2025
    Inventors: Kadthala R. NARENDRNATH, Behnam BEHZIZ, Benny WU, Moreshwar Narayan PURANDARE
  • Fixture for automatic calibration of substrate transfer robot
    Patent number: 12168301
    Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: December 17, 2024
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Richard Blank, Aravind Alwan, Behnam Behziz, Peter Thaulad, Mark E. Emerson
  • FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT
    Publication number: 20220134568
    Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.
    Type: Application
    Filed: February 27, 2020
    Publication date: May 5, 2022
    Inventors: Richard BLANK, Aravind ALWAN, Behnam BEHZIZ, Peter THAULAD, Mark E. EMERSON