Abstract: The disclosed devices utilize nonlinearly coupled modes of vibration to provide robust inertial sensors, such as gyroscopes. This actuation mechanism introduces a wider bandwidth in the sense-mode frequency response curve, and consequently enhances robustness to parameter fluctuations due to operating conditions and fabrication imperfections. The vibratory modes of the device are designed to have distinct frequencies where the drive-mode natural frequency is twice the modal frequency of the sense mode. The nonlinear modal interaction due to internal resonance can also be magnified through nonlinearity feedback. The sense mode response can be enhanced in shape, quality factor, and bandwidth by feeding back nonlinear quadratic, cubic, etc. terms.

Abstract: A capacitive accelerometer sensor including first and second substrates is disclosed, wherein the first substrate comprises a resilient membrane having at least one first electrode and a proof mass attached to the resilient membrane; the second substrate includes at least one second electrode; and the first and second substrates are bonded to each other such that the first electrode of the resilient membrane on the first substrate faces the second electrode and is separated from the second electrode on the second substrate by a capacitive gap; and the first and second substrates comprise a plurality of openings and electrical contacts electrically connected to each of the first and second electrodes, respectively.

Abstract: A telematics device located on-board a vehicle or other enclosure assists in detecting a glass break event for a window of the vehicle or enclosure based on acceleration measurements obtained from acceleration sensors of the telematics device. A power spectral density (PSD) for a plurality of packets of acceleration data within a higher frequency band and/or a lower frequency band are determined. A glass break event is detected upon determining that an average PSD for the higher frequency band exceeds an upper PSD threshold. Alternatively or additionally, a glass break event is detected upon determining that a second maximum PSD is greater than a first PSD threshold for the lower frequency band, and that a difference between the second maximum PSD and a minimum PSD is greater than a second PSD threshold for the lower frequency band.

Abstract: A telematics device located on-board a vehicle or other enclosure assists in detecting a glass break event for a window of the vehicle or enclosure based on acceleration measurements obtained from acceleration sensors of the telematics device. A power spectral density (PSD) for a plurality of packets of acceleration data within a higher frequency band and/or a lower frequency band are determined. A glass break event is detected upon determining that an average PSD for the higher frequency band exceeds an upper PSD threshold. Alternatively or additionally, a glass break event is detected upon determining that a second maximum PSD is greater than a first PSD threshold for the lower frequency band, and that a difference between the second maximum PSD and a minimum PSD is greater than a second PSD threshold for the lower frequency band.

Abstract: A vector light sensor (VLS) includes a substrate and a sensor structure. The substrate includes a major surface. The sensor structure includes a pyramid structure, light-sensitive areas, and electrical contacts. The pyramid structure forms at least a portion of a body of the sensor structure and has predefined angles between the major surface of the substrate and a plurality of sidewalls of the pyramid. The light-sensitive areas are formed on two or more of the plurality of sidewalls of the pyramid structure. The electrical contacts are electrically coupled to the light-sensitive areas. Information about the information about intensity and direction of an incident light beam can be extracted by comparing signals from two or more of the light-sensitive areas.

Abstract: A vector light sensor (VLS) includes a substrate and a sensor structure. The substrate includes a major surface. The sensor structure includes a pyramid structure, light-sensitive areas, and electrical contacts. The pyramid structure forms at least a portion of a body of the sensor structure and has predefined angles between the major surface of the substrate and a plurality of sidewalls of the pyramid. The light-sensitive areas are formed on two or more of the plurality of sidewalls of the pyramid structure. The electrical contacts are electrically coupled to the light-sensitive areas. Information about the information about intensity and direction of an incident light beam can be extracted by comparing signals from two or more of the light-sensitive areas.

Abstract: A vector light sensor (VLS) includes a substrate and a sensor structure. The substrate includes a major surface. The sensor structure includes a pyramid structure, light-sensitive areas, and electrical contacts. The pyramid structure forms at least a portion of a body of the sensor structure and has predefined angles between the major surface of the substrate and a plurality of sidewalls of the pyramid. The light-sensitive areas are formed on two or more of the plurality of sidewalls of the pyramid structure. The electrical contacts are electrically coupled to the light-sensitive areas. Information about the intensity and direction of an incident light beam can be extracted by comparing signals from two or more of the light-sensitive areas. One or two dimensional arrays of VLS may be fabricated and used, for example, as an image sensor.

Abstract: Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.

Abstract: Methods and apparatus for measuring magnetic field are provided. A resonator having a resonant frequency is that varies as a function of magnetic field is driven with a drive signal, and produces an output that is converted to electrical form. This output is then processed to isolate interference components due to the drive signal and to produce a sense signal. The sense signal is the processed to produce the drive signal. The sense signal is also processed to produce an output representative of the magnetic field.

Abstract: Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.

Abstract: An electrical potential sensor device comprises sensor electrodes arranged to measure a voltage based on a change in electrical charge induced in the sensor electrodes by exposure to an electrical potential of a source to be measured. An electro-thermally operated mechanism, adjacent to the sensor electrodes, is movable between a first position in which only first ones of the sensor electrodes are exposed to the electrical potential of the source to be measured and other sensor electrodes are shielded from the electrical potential, and a second position in which other ones of the sensor electrodes are exposed to the electrical potential and the first ones are substantially shielded from the electrical potential. A controller combines the output from the two sets of electrodes which are alternately exposed to the electrical potential to calculate a resulting measured/sensed voltage or measured/sensed electrical potential of the device.