Abstract: An acoustic sensor includes at least one optical waveguide configured to emit an optical beam, a substantially planar first substrate optically coupled to the at least one optical waveguide, and a substantially planar second substrate substantially parallel to the first substrate, affixed to the first substrate, and affixed to the at least one optical waveguide. The first substrate is configured to be illuminated by the optical beam and to reflect at least a portion of the optical beam to the at least one optical waveguide. The first substrate includes a first substrate portion configured to reflect a first portion of the optical beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the optical beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The optical beam is centered on a region between the first substrate portion and the diaphragm.

Abstract: A sensor includes at least one optical waveguide and an optical reflector optically coupled to the at least one optical waveguide. The optical reflector includes a first substrate portion configured to reflect a first portion of a light beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The light beam is centered on a region between the first substrate portion and the diaphragm.

Abstract: A sensor includes at least one optical waveguide and an optical reflector optically coupled to the at least one optical waveguide. The optical reflector includes a first substrate portion configured to reflect a first portion of a light beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The light beam is centered on a region between the first substrate portion and the diaphragm.

Abstract: A sensor includes at least one optical waveguide having a mode-field diameter greater than 11 ?m and an optical reflector optically coupled to the at least one optical waveguide. The optical reflector includes a first substrate portion configured to reflect a first portion of a light beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The light beam is centered on a region between the first substrate portion and the diaphragm.

Abstract: A sensor is provided. The sensor includes at least one optical waveguide and an optical reflector. The optical reflector is optically coupled to the at least one optical waveguide and includes a first portion and a second portion. The first portion is configured to reflect a first portion of light back to the at least one optical waveguide. The second portion is configured to reflect a second portion of light back to the at least one optical waveguide. The reflected second portion of the light differs in phase from the reflected first portion of the light by a phase difference that is not substantially equal to an integer multiple of ? when the second portion of the optical reflector is in an equilibrium position in absence of the perturbation.

Abstract: A sensor includes at least one optical waveguide having a mode-field diameter greater than 11 ?m and an optical reflector optically coupled to the at least one optical waveguide. The optical reflector includes a first substrate portion configured to reflect a first portion of a light beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The light beam is centered on a region between the first substrate portion and the diaphragm.

Abstract: A sensor is provided. The sensor includes at least one optical waveguide and an optical reflector. The optical reflector is optically coupled to the at least one optical waveguide and includes a first portion and a second portion. The first portion is configured to reflect a first portion of light back to the at least one optical waveguide. The second portion is configured to reflect a second portion of light back to the at least one optical waveguide. The reflected second portion of the light differs in phase from the reflected first portion of the light by a phase difference that is not substantially equal to an integer multiple of ? when the second portion of the optical reflector is in an equilibrium position in absence of the perturbation.

Abstract: A sensor and a method of fabrication are provided. The sensor includes at least one optical waveguide and an optical reflector. The optical reflector is optically coupled to the at least one optical waveguide and includes a first portion and a second portion. The first portion is configured to reflect a first portion of light back to the at least one optical waveguide. The second portion is configured to reflect a second portion of light back to the at least one optical waveguide. The reflected second portion of the light differs in phase from the reflected first portion of the light by a phase difference that is not substantially equal to an integer multiple of ? when the second portion of the optical reflector is in an equilibrium position in absence of the perturbation.