Patents by Inventor Bella Chen

Bella Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of reducing number of particals on low-k material layer
    Publication number: 20060165913
    Abstract: A method of reducing the number of particles on a low-k material layer is described. The low-k material layer is formed by a plasma enhanced chemical vapor deposition process, wherein a reaction gas, a cleaning gas, a high-frequency power and a low-frequency power are used. The method comprises turning off the reaction gas and the low-frequency power after the low-k material layer is formed, and continuing to provide the cleaning gas during a delay time.
    Type: Application
    Filed: January 27, 2005
    Publication date: July 27, 2006
    Inventors: Bella Chen, Chin-Hsiang Lin, Chih-Chien Liu, Jerander Lai