Patents by Inventor Ben-Shu Chen

Ben-Shu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry flow control and monitor system for chemical mechanical polisher
    Patent number: 6860723
    Abstract: A system for controlling and monitoring a rate of flow of a fluid, such as a CMP slurry, comprising a pump for pumping the slurry; a flow meter for monitoring the rate of flow of the slurry; and a controller operably connected to the flow meter and the pump. The controller receives signals from the flow meter indicating the rate of flow of the slurry and controls the operational speed of the pump responsive to the flow meter signals. A degasser equipped with a level sensor may be further provided in the system for removing gas bubbles from the slurry.
    Type: Grant
    Filed: October 9, 2002
    Date of Patent: March 1, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Ben-Shu Chen, Chao-Jung Chang, Jui-Cheng Lo, Chin-Hsin Peng, Chien-Kuo Lu