Patents by Inventor Benben Li

Benben Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260313875
    Abstract: A microelectronic device includes local word line (LWL) structures, memory cells, sub-word line driver (SWD) devices, and a global word line (GWL) structure. The LWL structures are vertically stacked relative to one another. The memory cells are vertically stacked relative to one another within a vertical span of the LWL structures, and are operatively connected to different ones of the LWL structures than one another. The SWD devices are vertically stacked relative to one another within the vertical span of the LWL structures, and are individually operatively connected to a respective one of the LWL structures. The GWL structure continuously vertically extending across and is operatively connected to the SWD devices. Related memory devices and electronic systems are also described.
    Type: Application
    Filed: March 9, 2026
    Publication date: October 8, 2026
    Inventors: Kamal M. Karda, Eric S. Carman, Duane R. Mills, David A. Daycock, Benben Li, Muralikrishnan Balakrishnan
  • Publication number: 20260271277
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes. The horizontally oriented access devices include first source/drain regions and a second source/drain regions separated by channel regions. Gates at the channel regions formed fully around every surface of the channel region as gate-all-around (GAA) structures separated from channel regions by gate dielectrics. The memory cells have horizontally oriented storage nodes connected to the second source/drain regions and digit lines connected to the first source/drain regions.
    Type: Application
    Filed: March 4, 2026
    Publication date: September 10, 2026
    Inventors: Benben Li, Cheng Li
  • Publication number: 20260025987
    Abstract: Systems, methods, and apparatus are provided for access line structures for an access line partition outside an array for three dimensional (3D) memory. Forming the access line structures includes forming horizontally oriented access devices and horizontally oriented storage nodes in a plurality of levels of the vertically stacked 3D memory array, forming a first vertical opening through the vertically stacked 3D memory array, depositing a doped silicon (Si) material in the first vertical opening, selectively removing portions of the doped Si material in an array region, selectively removing portions of the doped Si in a patch isolation region separating the array region from a peripheral component region of the vertically stacked 3D memory array, selectively removing portions of the continuous horizontal access lines in the patch isolation region, and replacing the removed portions of the continuous horizontal access lines with a first dielectric material in the patch isolation region.
    Type: Application
    Filed: July 8, 2025
    Publication date: January 22, 2026
    Inventors: Benben Li, Cheng Li
  • Patent number: 11763889
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: September 19, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Patent number: 11569258
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Grant
    Filed: July 20, 2020
    Date of Patent: January 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Publication number: 20220284959
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Application
    Filed: March 28, 2022
    Publication date: September 8, 2022
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Patent number: 11289163
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Publication number: 20210118508
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Application
    Filed: November 2, 2020
    Publication date: April 22, 2021
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Publication number: 20200350333
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Application
    Filed: July 20, 2020
    Publication date: November 5, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Patent number: 10825523
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: November 3, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Patent number: 10748921
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: August 18, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Publication number: 20200135751
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Application
    Filed: October 25, 2018
    Publication date: April 30, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Publication number: 20200066346
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Application
    Filed: October 29, 2019
    Publication date: February 27, 2020
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Patent number: 10475515
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: November 12, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Publication number: 20190198109
    Abstract: Some embodiments include apparatuses and methods of forming such apparatuses. One of the apparatus includes first memory cells located in different levels in a first portion of the apparatus, second memory cells located in different levels in a second portion of the apparatus, a switch located in a third portion of the apparatus between the first and second portions, first and second control gates to access the first and second memory cells, an additional control gate located between the first and second control gates to control the switch, a first conductive structure having a thickness and extending perpendicular to the levels in the first portion of the apparatus, a first dielectric structure between the first conductive structure and charge-storage portions of the first memory cells, a second dielectric structure having a second thickness between the second conductive structure and a sidewall of the additional control gate, the second thickness being greater than the first thickness.
    Type: Application
    Filed: December 21, 2017
    Publication date: June 27, 2019
    Inventors: Benben Li, Akira Goda, Ramey M. Abdelrahaman, Ian C. Laboriante, Krishna K. Parat
  • Patent number: 9412821
    Abstract: A hollow-channel memory device comprises a source layer, a first hollow-channel pillar structure formed on the source layer, and a second hollow-channel pillar structure formed on the first hollow-channel pillar structure. The first hollow-channel pillar structure comprises a first thin channel and the second hollow-channel pillar structure comprises a second thin channel that is in contact with the first thin channel. In one exemplary embodiment, the first thin channel comprises a first level of doping; and the second thin channel comprises a second level of doping that is different from the first level of doping. In another exemplary embodiment, the first and second levels of doping are the same.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: August 9, 2016
    Assignee: Intel Corporation
    Inventors: Fatma Arzum Simsek-Ege, Jie Jason Sun, Benben Li, Srikant Jayanti, Han Zhao, Guangyu Huang, Haitao Liu
  • Publication number: 20160126311
    Abstract: A hollow-channel memory device comprises a source layer, a first hollow-channel pillar structure formed on the source layer, and a second hollow-channel pillar structure formed on the first hollow-channel pillar structure. The first hollow-channel pillar structure comprises a first thin channel and the second hollow-channel pillar structure comprises a second thin channel that is in contact with the first thin channel. In one exemplary embodiment, the first thin channel comprises a first level of doping; and the second thin channel comprises a second level of doping that is different from the first level of doping. In another exemplary embodiment, the first and second levels of doping are the same.
    Type: Application
    Filed: November 5, 2015
    Publication date: May 5, 2016
    Applicant: Intel Corporation
    Inventors: Fatma Arzum Simsek-Ege, Jie Jason Sun, Benben Li, Srikant Jayanti, Han Zhao, Guangyu Huang, Haitao Liu
  • Patent number: 9330877
    Abstract: Logic devices are provided in multiple sub-collector and sub-emitter microplasma devices formed in thin and flexible, or inflexible, semiconductor materials. Logic operations are provided with one of a plurality of microplasmas forming sub-collectors with a common emitter, or a common collector plasma with a plurality of sub-emitter regions in a solid state semi-conductor pn-junction, and generating a logic output from an electrode, based upon electrode inputs to two other electrodes.
    Type: Grant
    Filed: June 1, 2015
    Date of Patent: May 3, 2016
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, Paul A. Tchertchian, Clark J. Wagner, Dane J. Sievers, Thomas J. Houlahan, Benben Li
  • Patent number: 9263558
    Abstract: A hybrid plasma semiconductor device has a thin and flexible semiconductor base layer. An emitter region is diffused into the base layer forming a pn-junction. An insulator layer is upon one side the base layer and emitter region. Base and emitter electrodes are isolated from each other by the insulator layer and electrically contact the base layer and emitter region through the insulator layer. A thin and flexible collector layer is upon an opposite side of the base layer. A microcavity is formed in the collector layer and is aligned with the emitter region. Collector electrodes are arranged to sustain a microplasma within the microcavity with application of voltage to the collector electrodes. A depth of the emitter region and a thickness of the base layer are set to define a predetermined thin portion of the base layer as a base region between the emitter region and the microcavity. Microplasma generated in the microcavity serves as a collector.
    Type: Grant
    Filed: August 5, 2014
    Date of Patent: February 16, 2016
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, Paul A. Tchertchian, Clark J. Wagner, Dane J. Sievers, Thomas J. Houlahan, Benben Li
  • Patent number: 9209199
    Abstract: A hollow-channel memory device comprises a source layer, a first hollow-channel pillar structure formed on the source layer, and a second hollow-channel pillar structure formed on the first hollow-channel pillar structure. The first hollow-channel pillar structure comprises a first thin channel and the second hollow-channel pillar structure comprises a second thin channel that is in contact with the first thin channel. In one exemplary embodiment, the first thin channel comprises a first level of doping; and the second thin channel comprises a second level of doping that is different from the first level of doping. In another exemplary embodiment, the first and second levels of doping are the same.
    Type: Grant
    Filed: March 21, 2014
    Date of Patent: December 8, 2015
    Assignee: Intel Corporation
    Inventors: Fatma Arzum Simsek-Ege, Jie Jason Sun, Benben Li, Srikant Jayanti, Han Zhao, Guangyu Huang, Haitao Liu