Patents by Inventor Benfu Lin

Benfu Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230301214
    Abstract: According to various embodiments, there may be provided an interposer. The interposer including: a substrate; a dielectric layer disposed on the substrate; a via disposed entirely within the dielectric layer; a resistive film layer disposed to line the via; a metal interconnect disposed in the resistive layer lined via; and a plurality of metal lines disposed in the dielectric layer, the plurality of metal lines including a first metal line connected to the metal interconnect, a second metal line connected to the resistive film layer at a first point, and a third metal line connected to the resistive film layer at a second point.
    Type: Application
    Filed: March 18, 2022
    Publication date: September 21, 2023
    Inventors: Lup San LEONG, Juan Boon TAN, Benfu LIN, Yi JIANG
  • Patent number: 11742283
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an integrated thin film resistor with a memory device and methods of manufacture. The structure includes a memory device in back end of line (BEOL) materials and a thin film resistor located in the BEOL materials. The thin film resistor includes electrical resistive material, and an insulator material over the electrical resistive material is thicker than insulator material over the memory device.
    Type: Grant
    Filed: December 31, 2020
    Date of Patent: August 29, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Kah Wee Gan, Benfu Lin, Yun Ling Tan
  • Patent number: 11744085
    Abstract: A semiconductor device includes a first insulating layer; a second insulating layer arranged over the first insulating layer; a memory structure arranged within a memory region and including a resistance changing memory element within the first insulating layer; and a logic structure arranged within a logic region. In the memory region, the first insulating layer may contact the second insulating layer and in the logic region, the semiconductor device may further include a stop layer arranged between the first insulating layer and the second insulating layer.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: August 29, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Benfu Lin, Yi Jiang, Lup San Leong, Juan Boon Tan
  • Patent number: 11641789
    Abstract: According to various embodiments, there is provided a memory cell. The memory cell may include a transistor, a dielectric member, an electrode and a contact member. The dielectric member may be disposed over the transistor. The electrode may be disposed over the dielectric member. The contact member has a first end and a second end opposite to the first end. The first end is disposed towards the transistor, and the second end is disposed towards the dielectric member. The contact member has a side surface extending from the first end to the second end. The second end may have a recessed end surface that has a section that slopes towards the side surface so as to form a tip with the side surface at the second end. The dielectric member may be disposed over the second end of the contact member and may include at least a portion disposed over the tip.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: May 2, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yi Jiang, Benfu Lin, Lup San Leong, Curtis Chun-I Hsieh, Wanbing Yi, Juan Boon Tan
  • Patent number: 11610837
    Abstract: A semiconductor device is provided, which includes a dielectric layer and a via structure. The dielectric layer is arranged over a substrate. The via structure is arranged in the dielectric layer, the via structure having a peripheral portion and a central portion. The peripheral portion of the via structure has a height that is greater than that of the central portion.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: March 21, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xuesong Rao, Benfu Lin, Bo Li, Chengang Feng, Yudi Setiawan, Yun Ling Tan
  • Patent number: 11600664
    Abstract: A memory device may be provided, including a substrate; one or more bottom electrodes arranged over the substrate; one or more switching layers arranged over the one or more bottom electrodes; and a plurality of top electrodes arranged over the one or more switching layers. Each of the one or more bottom electrodes may include at least one corner tip facing the switching layer, and an angle of each of the at least one corner tip may be less than ninety degrees.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: March 7, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh, Benfu Lin
  • Publication number: 20220416160
    Abstract: According to various embodiments, there is provided a memory cell. The memory cell may include a transistor, a dielectric member, an electrode and a contact member. The dielectric member may be disposed over the transistor. The electrode may be disposed over the dielectric member. The contact member has a first end and a second end opposite to the first end. The first end is disposed towards the transistor, and the second end is disposed towards the dielectric member. The contact member has a side surface extending from the first end to the second end. The second end may have a recessed end surface that has a section that slopes towards the side surface so as to form a tip with the side surface at the second end. The dielectric member may be disposed over the second end of the contact member and may include at least a portion disposed over the tip.
    Type: Application
    Filed: June 23, 2021
    Publication date: December 29, 2022
    Inventors: Yi JIANG, Benfu LIN, Lup San LEONG, Curtis Chun-I HSIEH, Wanbing YI, Juan Boon TAN
  • Patent number: 11522131
    Abstract: An illustrative device disclosed herein includes a bottom electrode, a conformal switching layer positioned above the bottom electrode and a top electrode positioned above the conformal switching layer. The top electrode includes a conformal layer of conductive material positioned above the conformal switching layer and a conductive material positioned above the conformal layer of conductive material.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: December 6, 2022
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE LTD
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Benfu Lin, Cing Gie Lim, Wei-Hui Hsu, Juan Boon Tan
  • Publication number: 20220208675
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an integrated thin film resistor with a memory device and methods of manufacture. The structure includes: a memory device in back end of line (BEOL) materials; and a thin film resistor located in the BEOL materials.
    Type: Application
    Filed: December 31, 2020
    Publication date: June 30, 2022
    Inventors: Kah Wee GAN, Benfu LIN, Yun Ling TAN
  • Patent number: 11335635
    Abstract: A semiconductor device is provided. A semiconductor device includes a first and a second region, a dielectric layer, a capping layer, and a planar resistive layer. The dielectric layer is arranged over the first and second regions and the capping layer is arranged over the dielectric layer. The capping layer has a substantially planar top surface over the first and second regions. The planar resistive layer is encapsulated within the capping layer in the first device region.
    Type: Grant
    Filed: April 8, 2020
    Date of Patent: May 17, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Benfu Lin, Kah Wee Gan, Cing Gie Lim, Chengang Feng
  • Publication number: 20220093508
    Abstract: A semiconductor device is provided, which includes a dielectric layer and a via structure. The dielectric layer is arranged over a substrate. The via structure is arranged in the dielectric layer, the via structure having a peripheral portion and a central portion. The peripheral portion of the via structure has a height that is greater than that of the central portion.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Inventors: XUESONG RAO, BENFU LIN, BO LI, CHENGANG FENG, YUDI SETIAWAN, YUN LING TAN
  • Publication number: 20220077234
    Abstract: A semiconductor device may be provided, including a first insulating layer; a second insulating layer arranged over the first insulating layer; a memory structure arranged within a memory region and including a resistance changing memory element within the first insulating layer; and a logic structure arranged within a logic region. In the memory region, the first insulating layer may contact the second insulating layer and in the logic region, the semiconductor device may further include a stop layer arranged between the first insulating layer and the second insulating layer.
    Type: Application
    Filed: September 10, 2020
    Publication date: March 10, 2022
    Inventors: Benfu LIN, Yi JIANG, Lup San LEONG, Juan Boon TAN
  • Publication number: 20220037590
    Abstract: An illustrative device disclosed herein includes a bottom electrode, a conformal switching layer positioned above the bottom electrode and a top electrode positioned above the conformal switching layer. The top electrode includes a conformal layer of conductive material positioned above the conformal switching layer and a conductive material positioned above the conformal layer of conductive material.
    Type: Application
    Filed: July 31, 2020
    Publication date: February 3, 2022
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Benfu Lin, Cing Gie Lim, Wei-Hui Hsu, Juan Boon Tan
  • Patent number: 11164858
    Abstract: According to various embodiments, an integrated circuit may include an upper inter-level dielectric (ILD) layer, a lower ILD layer, and an interlayer arranged between the upper ILD layer and the lower ILD layer. The integrated circuit may further include a capacitor device and a resistor device. The capacitor device may include a top plate disposed in a first region of the interlayer and a bottom plate disposed in the lower ILD layer. The resistor device may include a resistive element and a plurality of vias disposed in a second region of the interlayer. The plurality of vias may extend from the resistive element to the lower ILD layer. A distance between the top plate and the lower ILD layer may be at least substantially equal to a height of each via of the plurality of vias.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: November 2, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Benfu Lin, Bo Yu, Chim Seng Seet, Kin Wai Tang
  • Publication number: 20210320063
    Abstract: A semiconductor device is provided. A semiconductor device includes a first and a second region, a dielectric layer, a capping layer, and a planar resistive layer. The dielectric layer is arranged over the first and second regions and the capping layer is arranged over the dielectric layer. The capping layer has a substantially planar top surface over the first and second regions. The planar resistive layer is encapsulated within the capping layer in the first device region.
    Type: Application
    Filed: April 8, 2020
    Publication date: October 14, 2021
    Inventors: BENFU LIN, KAH WEE GAN, CING GIE LIM, CHENGANG FENG
  • Publication number: 20210288042
    Abstract: According to various embodiments, an integrated circuit may include an upper inter-level dielectric (ILD) layer, a lower ILD layer, and an interlayer arranged between the upper ILD layer and the lower ILD layer. The integrated circuit may further include a capacitor device and a resistor device. The capacitor device may include a top plate disposed in a first region of the interlayer and a bottom plate disposed in the lower ILD layer. The resistor device may include a resistive element and a plurality of vias disposed in a second region of the interlayer. The plurality of vias may extend from the resistive element to the lower ILD layer. A distance between the top plate and the lower ILD layer may be at least substantially equal to a height of each via of the plurality of vias.
    Type: Application
    Filed: March 12, 2020
    Publication date: September 16, 2021
    Inventors: Benfu LIN, Bo YU, Chim Seng SEET, Kin Wai TANG
  • Publication number: 20210225936
    Abstract: A memory device may be provided, including a substrate; one or more bottom electrodes arranged over the substrate; one or more switching layers arranged over the one or more bottom electrodes; and a plurality of top electrodes arranged over the one or more switching layers. Each of the one or more bottom electrodes may include at least one corner tip facing the switching layer, and an angle of each of the at least one corner tip may be less than ninety degrees.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 22, 2021
    Inventors: Lanxiang WANG, Shyue Seng TAN, Eng Huat TOH, Benfu LIN
  • Publication number: 20210028349
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a contact overlying a substrate, and a bottom electrode overlying the contact. The bottom electrode is in electrical communication with the contact, and the bottom electrode has a bottom electrode upper surface with a bottom electrode upper surface area. A magnetic tunnel junction memory cell overlies the bottom electrode and is in electrical communication with the bottom electrode. The magnetic tunnel junction memory cell has an MTJ bottom surface with an MTJ bottom surface area that is greater than the bottom electrode surface area.
    Type: Application
    Filed: July 24, 2019
    Publication date: January 28, 2021
    Inventors: Kah Wee Gan, Benfu Lin, Chim Seng Seet
  • Patent number: 10693054
    Abstract: A method of forming a memory cell with a high aspect ratio metal via formed underneath a metal tunnel junction (MTJ) and the resulting device are provided. Embodiments include a device having a metal via formed underneath a metal tunnel junction (MTJ) in a memory cell, and the metal via has an aspect ratio smaller than 2.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: June 23, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Danny Pak-Chum Shum, Wanbing Yi, Curtis Chun-I Hsieh, Yi Jiang, Juan Boon Tan, Benfu Lin
  • Publication number: 20200035906
    Abstract: A method of forming a memory cell with a high aspect ratio metal via formed underneath a metal tunnel junction (MTJ) and the resulting device are provided. Embodiments include a device having a metal via formed underneath a metal tunnel junction (MTJ) in a memory cell, and the metal via has an aspect ratio smaller than 2.
    Type: Application
    Filed: July 26, 2018
    Publication date: January 30, 2020
    Inventors: Danny Pak-Chum SHUM, Wanbing YI, Curtis Chun-I HSIEH, Yi JIANG, Juan Boon TAN, Benfu LIN