Abstract: A device for the detection of analytes comprises a substrate (10) with nano-antennas (11,12). The nano-antennas (11,12) comprise an antenna material (11m, 12m) for forming resonant antenna structures which receive and resonantly interact with source light (L0) to form respective resonance peaks (R1,R2) over a resonant wavelength range (A1,A2) overlapping respective signature wavelength (?1,?2) of a target analyte (A). The resonant interaction causes a locally concentrated field (Ec) of the source light (L0) in the resonant wavelength range (?1,?2). The concentrated intensity (Ic) is localized around a respective target location (T1,T2) which is provided with a sorption material (11s, 12s) that sorbs the target analyte (A). This provides a locally increased analyte concentration (Ac) of the target analyte (A) coinciding with the locally concentrated field (Ec) of the source light (L0). Accordingly, the interaction of the source light (L0) with the target analyte (A) is enhanced.

Abstract: A device for the detection of analytes comprises a substrate (10) with nano-antennas (11,12). The nano-antennas (11,12) comprise an antenna material (11m, 12m) for forming resonant antenna structures which receive and resonantly interact with source light (L0) to form respective resonance peaks (R1,R2) over a resonant wavelength range (A1,A2) overlapping respective signature wavelength of a target analyte (A). The resonant interaction causes a locally concentrated field (Ec) of the source light (L0) in the resonant wavelength range (A1,A2). The concentrated intensity (Ic) is localized around a respective target location (T1,T2) which is provided with a sorption material (11s, 12s) that sorbs the target analyte (A). This provides a locally increased analyte concentration (Ac) of the target analyte (A) coinciding with the locally concentrated field (Ec) of the source light (L0). Accordingly, the interaction of the source light (L0) with the target analyte (A) is enhanced.

Abstract: A resonant amplitude grating mark has a periodic structure configured to scatter radiation incident on a surface plane of the alignment mark. The scattering is mainly by excitation of a resonant mode in the periodic structure parallel to the surface plane. The effective refractive indexes and lengths of portions of the periodic structure are configured to provide an optical path length of the unit cell in the direction of periodicity that equals an integer multiple of a wavelength present in the spectrum of the radiation. The effective refractive indexes and lengths of the portions are also configured to provide an optical path length of the second portion in the direction of periodicity that is equal to half of the wavelength present in the spectrum of the radiation.

Abstract: A resonant amplitude grating mark has a periodic structure configured to scatter radiation incident on a surface plane of the alignment mark. The scattering is mainly by excitation of a resonant mode in the periodic structure parallel to the surface plane. The effective refractive indexes and lengths of portions of the periodic structure are configured to provide an optical path length of the unit cell in the direction of periodicity that equals an integer multiple of a wavelength present in the spectrum of the radiation. The effective refractive indexes and lengths of the portions are also configured to provide an optical path length of the second portion in the direction of periodicity that is equal to half of the wavelength present in the spectrum of the radiation.