Patents by Inventor Benito Herrero

Benito Herrero has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of integrated circuit fabrication
    Patent number: 6020256
    Abstract: Dielectric planarization is achieved by Defocus and under exposure of photoresist. The photoresist may be etched at the same rate as the dielectric, thereby yielding a smooth or planarized dielectric.
    Type: Grant
    Filed: December 18, 1996
    Date of Patent: February 1, 2000
    Assignee: Lucent Technologies Inc.
    Inventors: Alberto Colina, Benito Herrero