Patents by Inventor Benjamin David DAWSON

Benjamin David DAWSON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, substrate table, and method
    Patent number: 11988971
    Abstract: A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: May 21, 2024
    Assignees: ASML HOLDING N.V., ASML NETHERLANDS B.V.
    Inventors: Matthew Lipson, Satish Achanta, Benjamin David Dawson, Matthew Anthony Sorna, Iliya Sigal, Tammo Uitterdijk
  • LASER ROUGHENING: ENGINEERING THE ROUGHNESS OF THE BURL TOP
    Publication number: 20220134480
    Abstract: Methods, computer program products, and apparatuses for reducing sticking during a lithography process are disclosed. An exemplary method of reducing sticking of an object to a modified surface that is used to support the object in a lithography process can include controlling a light source to deliver light to a native surface thereby causing ablation of at least a portion of the native surface to increase the roughness of the native surface thereby forming the modified surface. The increased roughness reduces the ability of the object to stick to the modified surface.
    Type: Application
    Filed: February 3, 2020
    Publication date: May 5, 2022
    Applicant: ASML Holding N.V.
    Inventors: Damoon SOHRABIBABAHEIDARY, Christopher John MASON, Peter HELMUS, Mehmet Ali AKBAS, Bensely ALBERT, Benjamin David DAWSON
  • LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
    Publication number: 20220082953
    Abstract: A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
    Type: Application
    Filed: May 5, 2020
    Publication date: March 17, 2022
    Applicants: ASML HOLDING N.V., ASML NETHERLANDS B.V.
    Inventors: Matthew LIPSON, Satish ACHANTA, Benjamin David DAWSON, Matthew Anthony SORNA, IIiya SIGAL, Tammo UITTERDIJK