Patents by Inventor Benjamin Goss

Benjamin Goss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6895178
    Abstract: The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: May 17, 2005
    Assignee: MKS Instruments, Inc.
    Inventors: Youfan Gu, Paul Dozoretz, Benjamin Goss, David Neumeister, James Mueller, Donald W. Higgins
  • Publication number: 20030063901
    Abstract: The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
    Type: Application
    Filed: July 16, 2002
    Publication date: April 3, 2003
    Inventors: Youfan Gu, Paul Dozoretz, Benjamin Goss, David Neumeister, James Mueller, Donald W. Higgins