Abstract: The present disclosure relates to an operating method of an interface sensor, comprising steps of: arranging the interface sensor in a container full of a measurement medium so that the interface sensor is in contact with the measurement medium, and recording a measured value curve with measured values using the interface sensor. The method also includes evaluating the measured value curve using a control unit, comprising steps of: determining a layer boundary, determining a first sedimentation parameter, determining a second sedimentation parameter, determining a sedimentation indicator on the basis of a relationship between the first sedimentation parameter and the second sedimentation parameter, and outputting of the sedimentation indicator using the control unit.

Abstract: Sealing structures for processing chambers are provided. For example, a system can include a base sealing structure, and an elastomer bonded to a surface of the base sealing structure to form a sealing structure. As another example, a system can include a lid of a processing chamber, a body of processing chamber, an elastomer sealing structure located between the lid and the body, wherein the elastomer sealing structure has a ribbon shape and includes a material that lacks per- and/or polyfluoroalkyl substances (PFAS).