Abstract: A switching device comprises a swinging element (1) that is able to move between two end positions (A, B). Holding electrodes (4, 5) are placed in end positions (4, 5). A control circuit (8) controls the switching by generating signals of suitable voltage. Swinging element (1) is attached in an elastic manner (for example, by a flexible rod 2) in such a way that the elastic return force which tends toward a zero position (0) has, in an essential amplitude range, a higher value than the electrostatic force of attraction created by the control circuit and holding electrodes (4, 5) and acts in the opposite direction, in such a way that the switching time of the swinging element is determined primarily by its natural frequency and not by the magnitude of the electrostatic force of attraction.

Abstract: A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap.