Patents by Inventor Benjamin Philip HEINE

Benjamin Philip HEINE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
    Publication number: 20220246404
    Abstract: A component for use in a plasma processing chamber is provided. A metal containing component body is provided. A sealant coating is over a surface of the metal containing component body, wherein the sealant coating comprises at least one of a silicone sealant, an organic sealant, or epoxy sealant, wherein the sealant coating is not covered and directly exposed to plasma in the plasma processing chamber.
    Type: Application
    Filed: June 10, 2020
    Publication date: August 4, 2022
    Inventors: Benjamin Philip HEINE, Darrell EHRLICH, Robin KOSHY, Slobodan MITROVIC, John DAUGHERTY