Patents by Inventor Benjamin Riordan

Benjamin Riordan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Complementary traveling masks
    Patent number: 9722129
    Abstract: A method of processing a solar cell is disclosed, where a chained patterned ion implant is performed to create a workpiece having a lightly doped surface having more heavily doped regions. This configuration may be used in various embodiments, such as for selective emitter solar cells. Additionally, various mask sets that can be used to create this desired pattern are also disclosed. The mask set may include one or more masks that have an open portion and a patterned portion, where the union of the open portions of the masks comprises the entirety of the surface to be implanted. The patterned portions of the masks combine to create the desired pattern of heavily doped regions.
    Type: Grant
    Filed: February 9, 2015
    Date of Patent: August 1, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Nicholas P T Bateman, Benjamin Riordan, William T. Weaver
  • Complementary Traveling Masks
    Publication number: 20150228842
    Abstract: A method of processing a solar cell is disclosed, where a chained patterned ion implant is performed to create a workpiece having a lightly doped surface having more heavily doped regions. This configuration may be used in various embodiments, such as for selective emitter solar cells. Additionally, various mask sets that can be used to create this desired pattern are also disclosed. The mask set may include one or more masks that have an open portion and a patterned portion, where the union of the open portions of the masks comprises the entirety of the surface to be implanted. The patterned portions of the masks combine to create the desired pattern of heavily doped regions.
    Type: Application
    Filed: February 9, 2015
    Publication date: August 13, 2015
    Inventors: Nicholas PT Bateman, Benjamin Riordan, William T. Weaver