Patents by Inventor Benjamin Wayne Mooring

Benjamin Wayne Mooring has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhanced automatic wafer centering system and techniques for same
    Patent number: 11581214
    Abstract: Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: February 14, 2023
    Assignee: Lam Research Corporation
    Inventors: Peter S. Thaulad, Brett M. Herzig, Richard M. Blank, Benjamin Wayne Mooring
  • ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME
    Publication number: 20220028714
    Abstract: Systems and techniques for determining and correcting inter-wafer misalignments in a stack of wafers transported by a wafer handling robot are discussed. An enhanced automatic wafer centering system is provided that may be used to determine a smallest circle associated with the stack of wafers, which may then be used to determine whether or not the stack of wafer meets various process requirements and/or if a centering correction can be made to better align the wafers with a receiving station coordinate frame.
    Type: Application
    Filed: October 31, 2019
    Publication date: January 27, 2022
    Inventors: Peter S. Thaulad, Brett M. Herzig, Richard M. Blank, Benjamin Wayne Mooring