Abstract: A method and apparatus for performing optical microscopy in one to three dimensions employs a spectral self-interference fluorescent microscopy technique that includes providing at least one fluorescent microscopy sample (220a, 220b), at least one objective lens (201), and a reflecting surface (204). The fluorescent sample is disposed between the objective lens and the reflecting surface, the distance (d1, d2) from the sample to the reflecting surface is several to several tens times an excitation wavelength. Excitation light (216) causes the fluorescent sample to emit light (214), at least a portion (214b) of which is reflected by the reflecting surface. The objective lens collects both the reflected light and the light emitted directly by the fluorescent sample (214a). The direct and reflected light interferences causing spectral oscillations in the emission spectrum.

Abstract: A viewing enhancement lens (18-NAIL) which functions to increase the numerical aperture or light gathering or focusing power of viewing optics such as a microscope (26) used to view structure within a substrate such as a semiconductor wafer or chip or of imaging optics such as media recorders. The result is to increase the resolution of the system by a factor of between n, and n2, where n is the index of retraction of the lens substrate.

Abstract: A near-field optical microscope is provided having a tip or tapered optical fiber light guide mounted directly in a hole drilled in the center of a microlens which itself is mounted in a piezoelectric tube for dithering. The tip of the tapered fiber is positioned at the front focal point of the lens. Light emanating from the region just about the tip is thus collected and collimated by the lens. A second lens, further down the optical path next focuses the beam into another fiber for transmission to a photon detection and/or spectroscopic apparatus. This second fiber can alternatively be replaced by one or more image processing lenses or a coherent fiber bundle with the light being transmitted to a position sensitive detector to provide a direct image of the tip region. The microscope also includes a shear force dithering apparatus for control of fiber tip to sample distance.