Abstract: An inspection station for determining the characteristics of a visible overlay pattern on a ceramic substrate includes an electronic camera unit directed at each corner of the overlay pattern. The inspection station is calibrated using a calibration substrate having a known pattern, portions of which are viewed by the cameras. The cameras remain stationary during both the calibration process and during the subsequent inspection of one or more substrates. In a first version of the station, a holder holding the substrate in place is split into quadrants, which are moved with associated camera units to accommodate varying sizes of rectangular substrates. In a second version, a lens is added to increase the magnification of the optical path to the camera units.

Abstract: A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. Disks are moved into and out of the texturing process in cassettes, through two disk-handling stations. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately equal power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. The power control optics block includes means for attenuating and measuring each of the two beams. A shuttling mirror directs these two beams alternately at a disk within each of the two disk handling stations.

Abstract: A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.

Abstract: A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a disk for a hard disk drive. Disks are moved into and out of the texturing process in cassettes, through two disk-handling stations. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. The power level of each of these two beams is controlled by a program which operates in a teach mode to develop a look up table describing laser beam power as a function of a signal driving an attenuator, in a set point mode setting this drive signal to provide a certain laser beam power, in a run mode controlling this power through a feedback loop, and in a display mode showing laser beam power as a function of time.

Abstract: Inspection apparatus for determining the profile of textured spots extending in a pattern along a surface of a magnetic disk includes an interferometer which illuminates first and second, adjacently disposed test spots on the surface. The disk and the interferometer are moved, relative to one another, so that one of the test spots traverses the textured spots in the pattern while the other test spot is moved along a flat portion of the disk surface. In one embodiment, the inspection apparatus is built into the device forming the textured spots, providing feedback controlling the texturing process.