Patents by Inventor Ben-Son Chao

Ben-Son Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making showerhead for semiconductor processing apparatus
    Patent number: 8216640
    Abstract: A method of making a showerhead for a semiconductor processing apparatus is disclosed. In one embodiment, the method includes providing a substrate; forming first holes in the substrate; forming a protective film on the substrate, where the protective film covers sidewalls of the first holes; and forming second holes in the substrate, where a part of the protective film within the first holes is removed. In another embodiment, the method includes providing a substrate; forming islands on the substrate; forming a protective film on the substrate, where the protective film does not cover the tops of the islands; and forming holes in the islands.
    Type: Grant
    Filed: September 25, 2009
    Date of Patent: July 10, 2012
    Assignee: Hermes-Epitek Corporation
    Inventors: Ben-Son Chao, Yu-Feng Chang, Yen-Si Chen
  • Method of Making Showerhead for Semiconductor Processing Apparatus
    Publication number: 20110076401
    Abstract: A method of making a showerhead for a semiconductor processing apparatus is disclosed. In one embodiment, the method includes providing a substrate; forming first holes in the substrate; forming a protective film on the substrate, where the protective film covers sidewalls of the first holes; and forming second holes in the substrate, where a part of the protective film within the first holes is removed. In another embodiment, the method includes providing a substrate; forming islands on the substrate; forming a protective film on the substrate, where the protective film does not cover the tops of the islands; and forming holes in the islands.
    Type: Application
    Filed: September 25, 2009
    Publication date: March 31, 2011
    Applicant: HERMES-EPITEK CORPORATION
    Inventors: BEN-SON CHAO, YU-FENG CHANG, YEN-SI CHEN